DIN rail type, ACTUATOR, ELECTRIC, SLIDER, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 12.05194 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

DIN rail type, 25MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 9.83261 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2]Positioning repeatability [mm]Equivalent lead [mm]Impact/Vibration resistance [m/s2] Note 3)Actuation

7.5

connector Ambient and fluid temperature (C) Maximum operating frequency (Hz) 10 3 Non-locking push type Push-turn locking slotted type Main and pilot valve common exhaust Pilot valve individual exhaust Not required Unrestricted 150/30 Dustproof Manual override (Manual operation) Internal pilot External pilot Pilot exhaust method Lubrication Mounting orientation Shock/Vibration resistance (m/s2

Lightweight and Compact

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

53

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

If equipped with a light, be careful not to damage the light with the cords lead wires. 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For DC 10-SY3120-5LO-M5 SY100-30-4A-20 For AC 10-SY3120-1LO-M5 SY100-30-1A-20 Precautions Plug in and pull out the connector vertically without tilting to one side.

Compact Cylinder with Solenoid Valve/

Auto Switches Common Specifications Solid state auto switch Type Reed auto switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less Leakage current None Operating time 1 ms or less 1.2 ms Impact resistance 1000 m/s2 300 m/s2 50 M or more at 500 VDC Mega (Between lead wire and case) Insulation resistance 1500 VAC for 1 minute (Between lead wire and case) 1000 VAC for 1 minute (Between lead wire

JXCx-OMU0026

(Unit:mm/s2) Refer to (1) to (5) on page 53 for acceleration speed setting for movement mode. Acceleration 1 to Max ACC/DEC in the basic parameters Set the deceleration from travel speed to stop. (Unit:mm/s2) Refer to (1) to (5) on page 53 for deceleration speed setting for movement mode.

Metal Seal/Rubber Seal Series VQ Body Ported

S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Do not drop, bump, or apply excessive impact (PSE530, 540: 980 m/s2, PSE560: 500 m/s2, PSE550: 300 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is PSE530: 23 N, PSE540, 550, 560: 50 N or less. Applying a greater pulling force to it can cause malfunction.

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1500mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1500mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: -, I/O Connector: -, Option: -

Base Mounted Metal Seal/Rubber Seal Series VQ

S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 F F U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable

Electric Actuators

T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] L : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s2] (Operating condition) a2: Deceleration [mm/s2] (Operating condition) P T2: Constant speed time can be found from the following equation.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Table of Contents

S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge

Water-cooledThermo-chiller

-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

VQ5000

1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure

5 Port Solenoid Valve

Lead wire length (mm) Nil 600 1000 1500 2000 2500 3000 Blanking plate with output 10 15 20 25 30 Blanking plate with a connector for individually outputting electricity to drive a single valve or equipment that are not on the manifold base. Note 1) Electric current should be 0.5 A or less.