VQZ100V-OMT0001

3(R2 3(R2 3(R2 R) R) R) R) 5(R1) 5(R1) 5(R1) 5(R1) 1 1 1 1 P P P P) ) ) ) VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2

Flow Sensor Series PFMV

. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less Secure mounting of n pcs. (2 or more) switches (Vertical) 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) PFM PFMV PF2A PF2W PF2D IF 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less.

VZA2000

(A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 18 14 3 x Rc , 2 x Rc 18 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1761

XM, XY

changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5

AXTS-OMY0007

Configuration symbol AXTS040*-2(B)-X2 Symbol for internal pilot fluid passage Fig.1 Symbol for internal pilot fluid passage. 1(P) Port:IN Port SUP.Air(for air blow 4(A) Port:OUT Port 3(R2) Port: Released to atmosphere (pilot exhaust port with silencer) AXTS040*-3(B)-X2 Symbol for internal pilot fluid passage Fig.2 Symbol for external pilot fluid passage. 3(R2) port: IN Port SUP. air (

K35-OMX0029

port R1 FU port FB port FA port R1 port P port R3 port R2 port Caution Do not allow foreign matter such as cutting chips inside the cylinder from the ports.

MHY2/MHW2

A part z1 m1 = 40 X 7 X 8 X 2.7 X 10-6 Calculation of weight m1 = a X b X c X Specific gravity = 0.006(kg) Iz1 = {0.006 X (40 2+7 2)/12} X 10-6 Moment of inertia around Z1 axis = 0.8 X 10-6 (kgm 2) = 0.8 X 10-6+ 0.006 X 37 2 X 10-6 Iz1 = {m1(a 2+ b 2)/12} X 10-6 IA = 9.0 X 10-6(kgm 2) Moment of inertia around Z axis IA = IZ1 + m1r1 2 X 10-6 z r2 Z2 B part r2 = 47(mm) m2 = 5 X 10 X 12 X

180° Angular Style Air Gripper Series MHY2/MHW2

z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis Z2 = {m2 (d2 + e2)/12} x 10-6 Z2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) B = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) = 9.0 x 10-6 + 4.4 x 10-6 = 13.4 x 10-6= 0.13 x 10-4 (kgm2) Moment of inertia around Z axis

Interface Regulator for VQ4000 5 Port Solenoid Valve

Pressure gauge SMC 1 P 5 3 R2 R1 D side PE Pressure Setting Caution 1. Set the pressure of an interface regulator using a flat head screw driver. 2. The pressure adjustment is increased by turning clockwise and decreased by turning counter clockwise. Perform pressure setting by increasing from low pressure to the desired setting. 3.

Series VQ Metal Seal/Rubber Seal Body Ported

Name of terminal block (LED) Note POWER RUN SD RD ERR RUN ERR TRD 10 1 24V 0V S1 S2 SG R1 R2 FG SDA SDB SG RDA RDB FG 24V 0V VV5Q14 LED name POWER Details Lighting when power is turned ON Lighting when data transmission with the master station is normal Lighting during data reception Lighting during data transmission Lighting when reception data error occurs.

Digital Flow Switch

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 19 PF3A7 H Series Function Details For setting of functions and operation method, refer to the Operation Manual from the

2-Color Display

. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 9 Series ZSE30A(F)/ISE30A Function Details A Copy function (F97) The settings of the master sensor can be copied to the slave sensors.

7mm Wide, Compact, Pilot Operated, 5 Port Solenoid Valve Series S0700

Solenoid specifications 5 (R1) 3 (R2) 1 (P) 0.35W (Standard) 0.1W (With power saving circuit, when energized) 4 (A) 2 (B) Power consumption N.O. N.O. Coil rated voltage 12/24VDC 5 (R1) 3 (R2) 1 (P) Flow characteristics 4 (A) 2 (B) Flow characteristics C[dm3/(s.bar)] 0.36 0.32 N.C. N.O. 5 (R1) 3 (R2) v 0.1 0.08 b 0.39 0.33 1 (P) 2-position, single/double 4-position, dual 3 port

5 Port Solenoid Valve Series SQ1000/2000

Exhaust center: SQ A31 Pressure center: SQ B31 5 (R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Note 3) R2 and J2 are available with up to 8 solenoids. OMRON Corp.: CompoBus/S System (16 outputs) OMRON Corp.: CompoBus/S System (8 outputs) R1 R2 Pilot type V Nil R Internal pilot CC-Link External pilot SUP/EXH block mounting position SI unit part no. U D B M CE-compliant SI unit part no.

Exhaust Cleaner for Vacuum Pump AMV Series

R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789