HRL

inlet Ventilation air outlet 715 40 or less 954 330 10 1538 A 1026 984 627 677 Anchor bolt mounting position (View A) For piping port sizes, refer to the Parts Description on page 330. 328 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Dimensions HRL300-Am-20 Ventilation air inlet Ventilation air inlet Ventilation air outlet 850 40 or less 1079 330 10 1839 A 1145 1109 700 750

ISO Cylinder

Action Single acting, Single rod Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Min. operating pressure Rubber bumper Spring return: 0.18 MPa Spring extend: 0.23 MPa Ambient and fluid temperature Without auto switch: 20C to 80C (No freezing) With auto switch: 10C to 60C (No freezing) Lubricant Not required (Non-lube) Stroke length tolerance +1.4 0 mm Piston speed 50 to 750

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

MGC

The load kinetic energy can be obtained by the following equation: 5 a 1 Rush speed into cushion (mm/s) 100 50 200 500 750 M Also, selection can be made by using the graph above. Example) Find the maximum load weight when using a cylinder with 32, stroke 500 mm, with rear plate as a lifter at an average speed of a 300 mm/s.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 1 600 st 400 st 500 st st: Stroke (mm) 0.5 100 st 200 st 300 st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM100Stroke 4 (Slide bearing type) 3.5 3 1300 st Deflection Y (mm) 2.5 1200 st 1100 st 2 1000 st 1.5 900 st 800 st 1 600 st 700 st st: Stroke (mm) 400 st 500 st 0.5 100 st 200 st 300 st 0 0 100 50 150 200 250 300 350 400 450 500 550 600 650 700 750

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 750, Max. Transportable Mass Range (Horizontal)(kg): 20.1 to 50.0, Max. Transportable Mass (Horizontal)(kg): 30, Max. Transportable Mass Range (Vertical)(kg): 2.1 to 5.0, Max.

Size: 25, Motor Mounting Position: L (Symmetrical Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 50mm, Motor Option: B (w/Lock), Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: CE1 (JXCE1, EtherCAT®), I/O Cable Length

Size: 32, Motor Mounting Position: D (In-line), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Motor Mounting Position: L (Symmetrical Type), Lead: K (8mm), Stroke: 150mm, Motor Option: B (w/Lock), Body Option: S (Dust-protected), Mounting: w/o Side Holder, Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: L (Left Side Parallel), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 150mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 7 (Screw Mounting)

Body Size: 8, Type: L (Symmetric), Motor: Step Motor (Servo DC24V), Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 50mm, Lock: None, Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: CE1 (JXCE1, EtherCAT®), I/O Cable Length for LEC: Without Cable, Controller Mounting: 7

Size: 16, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: w/o Option, Guide Option: w/o Guide, Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 1 (1.5m), Controller Type for (LEC, JXC): CE1 (JXCE1, EtherCAT®), I/O

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 700mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 750mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 150mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable),

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: CE1 (JXCE1, EtherCAT®), I/O Cable Length for LEC: