CE2

Up to 900 RB 100 25 to 750 25 to 600 Up to 1100 Up to 850 BD1-04M BD1-05M BD1-08M BD1-10M BD1-06M (kg) Weight J 40 50 63 80 100 Bore size (mm) DBasic style 2.18 3.39 5.29 8.66 12.09 BA-04 BA-05 BA-08 BA-10 BA-06 Foot style 2.37 3.61 5.63 9.33 13.08 -X Flange style 2.55 3.84 6.08 10.11 14.01 Basic weight D-A3C/A44C D-G39C/K39C Single clevis style 2.41 3.73 5.92 9.77 13.87 BA3-040 BA3-050

Brake mechanism added

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 0 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 300 KN-R02-250:2.5 KN-R02-200:2 250 KN-R02-150:1.5 KNH-R02-150 200 KN-R02-100:1 150 KNH-R02-100

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

5 Port Solenoid Valve

VQC5000 Bore size MB, CA1 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm CS1 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Average speed [mm/s] 50 63 80 100 125 140 160 180 200 250 1100 Vertically upward Horizontal 1000 900 800 700 600 500 400 300 200 100 0 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable kinetic energy (mJ) Size With internal shock absorber With adjustment bolt With internal shock absorber With external shock absorber With external shock absorber With adjustment bolt For high energy For low energy 1 2 3 7 10 20 30 50 70 100 200 1 0.2 to 0.7 1.5 2 6 39 7 161 231 116 25 0.2 to 1.0 Note) 574 1060 0.2 to 0.7 0.2 to 1.0 116 48 805 1210 294 81 1310 1820 0.2 to 1.5 1100

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

CC

1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 314 264 491 412 804 691 1260 1100 1960 1650 3120 2800 5030 4540 7850 7150 12300 11300 15400 14400 20100 18800 25400 23900 31400 29500 49100 46300 70700 66800 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 8 20

CE2

Up to 900 RB 100 25 to 750 25 to 600 Up to 1100 Up to 850 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M (kg) Weight J 40 50 63 80 100 Bore size (mm) DBasic style 2.18 3.39 5.29 8.66 12.09 BA-04 BA-05 BA-06 BA-08 BA-10 Foot style 2.37 3.61 5.63 9.33 13.08 -X Flange style 2.55 3.84 6.08 10.11 14.01 Basic weight D-A3C/A44C D-G39C/K39C Single clevis style 2.41 3.73 5.92 9.77 13.87 BA3-040 BA3-050

MXS Series Air Slide Table

BS* X X X BT* X X X X B* X X X X X *End lock and shock absorber options are not available for MXS6 Note 1) When buffer is used in conjunction with extension stroke adjust, stroke adjustment will limit stroke of buffer. Applicable auto switch lead wire length(m) Load voltage Auto switch part No.

SLIDER SUPPORT GUIDE, ELECTRIC ACTUATOR, A06, 9.17 lb

SLIDER SUPPORT GUIDE, ELECTRIC ACTUATOR, A06, 7.88 lb

EXxx-OMC0002

Setup the node address and HOLD/CLEAR using the internal switches. 3 Communication power terminals (BS+, BS-) Connect the communication power supply BS+ and BS-. 4 Communication terminals (BDH, BDL) Connect the communication lines BDH and BDL. 5 FG terminal Connect the grounding cable. 6 Power supply terminals for solenoid valve (24 V, 0 V) Connect the power supply 24 V and 0 V for solenoid

MXS

Bore L 6 8 12 16 20 25 6 8 12 16 20 25 3.11-24 Air Slide Table Series MXS Option Specifications Dimensions of Adjuster Option/With Shock Absorber (BS, BT) Extension End Mounted to body Mounted to table D M Q A P J CL H K MLGC B CNA G G E E1 F C CB MXS-BS20 MXS-BS25 MXS-BS 8 MXS-BS12 MXS-BS16 L CV/MVG CXW Mounted to body Mounted to table Adjuster Part No.

SI unit

For connection of communication to SI unit, it is necessary to connect BDH and BDL of communication line to BDH and BDL of terminal respectively and also BS+ and BSof communication power supply to BS+ and BSof terminal respectively.

Support Guide, ELECTRIC ACTUATOR, A06, 6.16 lb

SQ1000/2000

V0V CANL FG CANH V+ 24V V0V CANL FG CANH V+ BDH BS+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA End resistance End resistance Master Connector with end resistance VSLD FG FG FG BDH CANL BDL FG CANH Type 3 grounding Type 3 grounding Type 3 grounding V+ Branching crimp connectors Twisted pair line with shielding DeviceNet CompoBus/S System

MU

BS + Stroke (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 BT Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5

Plate Cylinder

NY EY EY C AL B A K N N 4 x ND through Female thread bore size NE 4 x 2 x NC counterbore S + Stroke H ZZ + Stroke BY BY 2 x BT Rod end nut BX BS + Stroke BX P Cylinder port Element Note) Spring extend D1 C1 H1 B1 (mm) d H1 B1 C1 D1 Part no.

MU

BS + Stroke (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 BT Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5