Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Vacuum Pad

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

3 @1 q e r y C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products o !0 80, 100 80, 100 !1 !0 u Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CS95-32 No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

CL

-XC18 NPT finish piping port 1.2 mm 2 mm 100 mm/s -X50 Large bore lock-up cylinder Lock-up direction direction One direction (Lock direction can be changed.) 2.3 mm 3 mm 200 mm/s -X51 Both-directions lock-up cylinder Lock-up Unit Model 40 50 63 80 100 Applicable bore size (mm) Lock-up unit part no.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Positioning distance (mm) 1 10 100 300 600 10 0.5 1.5 10.5 30.5 60.5 100 0.5 0.6 1.5 3.5 6.5 Speed (mm/s) 150 0.5 0.6 1.2 2.5 4.5 300 0.5 0.6 0.9 1.6 2.6 Values will vary slightly depending on the operating conditions.

Slider Type Ball Screw Drive/11-LEFS Series

LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.

Compact 5-Port Solenoid Valve

500 100 300 500 Cylinder speed [mm/s] Cylinder speed [mm/s] Cylinder speed [mm/s] Refer to pages 9 to 12 for detailed conditions regarding the above cylinder speeds.

JXCx-OMU0026

0.0 0.0 0.5 2 Axis 2 LIN-I 50.00 100 0.0 0.0 0.5 Axis 3 0.00 100 0.0 0.0 0.5 Operation (Example) Axis 2 Travel distance 50mm Axis 2 speed 25mm/s Composite speed 50mm/s Step2 Step1 Travel distance 100mm Axis 2 speed 71mm/s Composite speed 100mm/s Travel distance 100mm Axis 1 speed 43mm/s (0, 0) Travel distance 100mm Axis 1 speed 71mm/s Axis 1 -69No.

Environment

500 600 Speed [mm/s] Speed [mm/s] LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 90 50 Lead 4: LEY32C 80 Lead 4: LEY32C 40 42 Horizontal work load [kg] Vertical work load [kg] 70 Lead 8: LEY32B 60 30 40 45 50 Lead 8: LEY32B 21 20 Lead 16: LEY32A 30 20 10 Lead 16: LEY32A 10 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] Graph of Allowable Lateral

Rotary Actuator/Vane Type

Single vane D: Double vane S D S D S D S D Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Side ported Side ported Side ported Side ported Side ported Side ported Side ported Side ported Port location Side ported (Nil) Axial ported (E) 90 Rotating angle 100 Standard/Free mount type 180 270 Single shaft S Double shaft W Long shaft with

CJ2

extend Bore size CJP 10 16 10mm 16mm Standard stroke (mm) CJ2 10 16 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 CM2 Mounting Spring return Basic Axial foot Front flange Double clevis B L F D Action C85 S T Single acting/Spring return Single acting/Spring extend CG1 MB CJ2K L 16 45 S Standard C95 CA1 CDJ2K L S 16 45 C73 With auto switch CS1 Number of switches S n With auto switch (Built-in

Aluminum High Vacuum Angle Valve

Main exhaust solenoid valve O-ring for S valve sliding Port 1(P) (Pressure port) t XLDV-40 to 160 30 Initial exhaust valve conductance L/s (viscous flow) XLD-100 XLD-160 25 20 XLD-63 XLD-80 r i 15 XLA XLD-50 10 XL XL z Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted without applying the pilot pressure to the pilot port S before operation

Combination Cylinder

Lock-up direction 2.3mm 3mm 200mm/s Lock-up Unit Style 40 50 63 80 100 Bore size (mm) CL-40 CL-50 CL-63 CL-80 CL-100 Lock up unit part No.

e

Load Mass Allowable Moment m1, m2, m3 M1 M2 M3 100 10 10 10 q wr t Load mass (kg) Moment (NNm) Moment (NNm) Moment (NNm) e 10 1 1 1 1 100 1000 0.1 100 1000 0.1 100 1000 0.1 100 1000 Speed (mm/s) Speed (mm/s) Speed (mm/s) Speed (mm/s) 1096 e-Rodless Actuator Basic Type / Nominal Size: 16, 25 Series E-MY2B How to Order 100 T M9BW E-MY2B 16 N Integrated control type W E-MY2B 16 N 100 T M9BW

Electric Actuator

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil Nil Power supply voltage (V) Compatible drivers Nil Without connector Without cable Without cable H S R 2 5 With connector Nil Without driver Standard cable 2 m 5 m A1 A2 B1 B2 C1 C2 S1 S2 LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100

CRBU

Axis direction Vane type Single vane Double vane Angle of rotation S D Symbol Symbol Angle of rotation Application Application Angle of rotation 90 180 270 Size 10 15 90 100 90 100 90 180 270 Double vane Single vane With Auto Switch Size 10/15 CDRB 10 UW 180 S 90 L CDRB 20 UW 180 S R73 L With Auto Switch Size 20/30 No. of auto switches S 1 With auto switch (With switching unit) Size 20 30

Auto Switch Guide

Main circuit of switch C J G5-S OUT Black Switch operating range (mm) Cylinder speed (mm/s) Switch detecting time CV Ex.) Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

LEY-OM007

g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 80.00 3000 3000 80 40 30 100 70.00 100.00 25.00 No.00[mm] 80[mm] 1AREA [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 0 [%] f 40 40[%] INPON ON INP OFF P.41 7.2 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 2AREA AREA1 2 [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 40 0 [%] f 170[mm] 2100[mm] AREAON