MQQ

Piston speed (3) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage MQQ M 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa RHC Note 1) Use clean, dry air with no freezing.

Compact Vacuum Ejector Series ZA

B Non-locking push type Locking type L N Latching positive common Latching negative common AMJ AMV Rated coil voltage Electrical entry 1 2 3 4 5 6 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC AEP L L plug connector, with 0.3 m lead wire HEP L plug connector, without connector, with light/surge voltage suppressor Lead wire length LO Related Nil 6 10 20 30 300 mm 600 mm 1000 mm 2000 mm 3000

0.4

Single solenoid Lead wire length AXT661-12AL 300 mm 600 mm 1000 mm 2000 mm 3000 mm AXT661-12AL 300 mm 600 mm 1000 mm 2000 mm 3000 mm Socket only (3 pcs.)

Digital Flow Switches

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.smcworld.com for details of products compatible with overseas standards.

Soft Start-up Valve AV2000/3000/4000/5000 1

1 Soft Start-up Valve AV2000/3000/4000/5000 F.R.L.

ARM10/11

Inlet pressure (MPa) 14-4-56 39 Series ARM2500/3000 Manifold Regulator Modular Style Construction F.R.L.

Pressure Control Equipment

Bracket Pressure gauge to 1 2 1 8 / / 14-5-15 Vacuum regulator IRV1000/2000/3000 Able to adjust the pressure for vacuum line Bracket Pressure gauge 100 to 1.3 kPa 14-6-1 M5 to 2 0.01 to 0.7 0.05 to 0.7 1 8 3 0 / Precision regulator VEX13 Large capacity exhaust regulators Setting sensitivity: 0.2% F.S. Repeatability: 0.5% F.S. Bracket Foot Pressure gauge Silencer 14-4-2 2 F.R.L.

Mechanically Jointed Rodless Cylinders

2000 2500 3000 l l Support spacing l1 (mm) Support spacing l1 (mm) Caution Note) A side support must be used to keep the spacing from exceeding the value inside the parentheses.

AC Servo Motor Driver (Pulse input type)

Calculating Acceleration/deceleration conversion example using an actuator with a 8 [mm] lead with an acceleration of 3000[mm/sec2].

AC Servo Motor Driver (SSCNET Type)

Calculating Acceleration/deceleration conversion example using an actuator with a 8 [mm] lead with an acceleration of 3000[mm/sec2].

AC Servo Motor Driver (SSCNET /H Type)

Calculating Acceleration/deceleration conversion example using an actuator with a 8 [mm] lead with an acceleration of 3000[mm/sec2].

Cylinder with Lock Series CLS

0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 125 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 7 Gragh 4 0.5MPaP 0.5MPaP 3000 3000 2000 2000 160 140 125 1000 1000 700 800 900 700 800 900 Load weight:

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Digital Flow Switches, Series PF2A, Series PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.poweraire.com for details of products compatible with overseas standards.

5 Port Solenoid Valve Series SV

5 Port Solenoid Valve Series SV Lateral Plug-In Style Manifold 4 Position Dual 3 Port Valves Available Accomodates Gateway Type Serial Wiring Manifold Option Conforming to IP65/IP67 New Concept New Concept Connector Type Manifold Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 Series SV1000/2000/3000/4000 The use of multi-pin connectors to replace wiring inside manifold blocks

Thermo-con/Rack Mount Type

3000 2500 2500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 15C 2000 2000 1500 1500 Ambient temperature 25C Ambient temperature 25C 1000 1000 Ambient temperature 35C 500 500 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Heating Capacity HECR002-A Circulating fluid: Tap water Circulating fluid: Ethylene

MQQ

C J G5-S 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less Weight/Standard Type: MQQT Supply pressure 0.3 MPa CV 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less Supply pressure 0.5 MPa (g) Note 1) Use clean, dry air with no freezing.

ARM10/11

Inlet pressure (MPa) 14-4-56 39 Series ARM2500/3000 Manifold Regulator Modular Style Construction F.R.L.

CLS

100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa ) P < 0.5 MPa 0.4 MPa ) P < 0.5 MPa CLS 4000 4000 250 CLQ 3000 3000 200 MLGP 2000 2000 180 160 RLQ 250 Load weight: m (kg) Load weight: m (kg) 140 1000 1000 700 800 900 700 800 900 125 200 MLU 180 600 600 160 400 500 500 ML1C 140 400 125 D300 300 200 200 -X 20[Example] 100 100

CNS

200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed