2-Color Display High Precision

acceleration, in X, Y, Z directions, for 2 hours each (De-energized) Insulation resistance Vibration resistance 100 m/s2 in X, Y, Z directions, 3 times each (De-energized) 2% F.S.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

acceleration, in X, Y, Z directions, for 2 hours each (De-energized) Vibration resistance Impact resistance 100 m/s2 in X, Y, Z directions, 3 times each (De-energized) 3% F.S.

2-Color Display

acceleration, in X, Y, Z directions, for 2 hours each (Non-energized) 100 m/s2 in X, Y, Z directions, 3 times each (Non-energized) 2% F.S.

Multistage Ejector Series ZL112.212

(OUT1: Green, OUT2: Red) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating/Stored: 35 to 85% RH (No condensation) 1000 VAC for 1 minute between live parts and case 50 M or more between live parts and case (at 500 VDC Mega) 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each 100 m/s2, in

9.8

in X, Y, Z directions for 2 hours each (De-energized) Vibration resistance 100 m/s2 in X, Y, Z directions 3 times each (De-energized) Impact resistance 2% F.S.

Actuator Position Sensor

Parameter Initial value Initial value Selection range (value) 2 (mm) Value/Range Setpoint 1 (SP1) 250 12.5 mm D-MP025 0 to 500 Setpoint 2 (SP2) 230 11.5 mm Measuring range 0 to 500 25 mm Setpoint 1 (SP1) 500 25 mm D-MP050 0 to 1000 Setpoint 2 (SP2) 480 24 mm Measuring range 0 to 1000 50 mm Setpoint 1 (SP1) 1000 50 mm D-MP100 0 to 2000 Setpoint 2 (SP2) 980 49 mm Measuring range 0 to 2000 100

HRX-OM-I051

Table 8-15 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 HRZ Series 8.7 Compliance 8-25 HRX-OM-I051 Chapter 8 Appendix Serial No. Model: Judgment 8.8 Thermo Chiller Daily Inspection Sheet Circulating fluid supply port cap Looseness IN press.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

Dedicated Controller

to 9800mm/s2 Note) Note) There are cases in which the position, speed and acceleration designations are not realized, depending on the actuator that is connected and the operating conditions.

ML1

2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY1H40 Horizontal collision: P = 0.5 MPa MY1H25 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 H unit Collision speed mm/s Collision speed mm/s H unit 1000 1000 L unit L unit 500 400 300 500 400 300 Air cushion Air cushion 200 200 Use this unit when operating with a load and speed exceeding the air cushion limit line, or when cushioning

AC Servo Motor Driver (SSCNET Type)

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 -37- 6.6.4 Movement distance Configuration and

AC Servo Motor Driver (SSCNET /H Type)

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 -39- 6.6.4 Movement distance Configuration and

Dedicated Controller Series LC1 Uniaxial Type

Home position return direction is selectable. 1008 points (when step designation is actuated) Addressing Absolute and incremental used in combination Position designation range 0.00mm to 4000.00mm Speed designation range 1mm/s to 2500mm/s Acceleration/deceleration designation range Trapezoidal acceleration/deceleration 1mm/s2 to 9800mm/s2 Note) There are cases in which the position, speed

Dedicated Controller

to 9800mm/s2 Note) Note) There are cases in which the position, speed and acceleration designations are not realized, depending on the actuator that is connected and the operating conditions.

Thermo-chiller

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning 15. In locations where strong impacts or vibrations occur 16.

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

39

Arm length L A Arm length L A Table 1 Table 1 A Model A Model CKZ3N50 CKZ3N63 CKZ3T50 CKZ3T63 5 10 Series CKZ3N Series CKZ3T 10 10 50 63 Arm length L: 150 mm Arm length L: 200 mm 3000 3000 Peak clamping force position 2500 2500 Peak clamping force position 0.7 MPa 2000 2000 Clamping force (N) Clamping force (N) 0.5 MPa 0.7 MPa 1500 1500 1000 1000 0.5 MPa 0.3 MPa 0.3 MPa 500 500 0 0 0 0.5