Compact Cylinder with Lock Series CLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 22 22.5 25 B A B A A B 20 25 36 6.5 37 7.5 33 3.5 24.5 27 24 25 32 41 8.5 9.5 38 5.5 42 27 29 26.5 32 40 8 9 43 5 44 40 32.5 30 30.5 40 50 10.5 49 7.5 50 11.5 46 36 36.5 38.5 50 63 48 13.5 49 14.5 45

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W S Model LVA2m LVA3m LVA4m LVA5m LVA6m Model LVA20 LVA30 LVA40 LVA50 LVA60 12.5 70.5 24 92.5 A B A B 29 110.5 SMC SMC 34.5 147 36 156 (mm) Dimensions A B R U P C D E G H J K L M N Q Model Rc 1/4 NPT 1/4 LVA2m 30 36 61 44 14.5 35 13 4 20 37 3.5 30 M5 x 0.8 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3m 36 47 81.5 56 19 45.5 17.5 7.5 34 46 5.5 41.5 Rc 1/2 NPT 1/2 LVA4m

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

53 41 63 10-SYJ3123 2 position 10-SYJ3223 5 port body ported 0.9 M3 x 0.5 M3 x 0.5 10-SYJ3323 3 position 58 56 66 10-SYJ3423 10-SYJ3523 37 55 36 53 41 63 10-SYJ3133 2 position 4 port base mounted (For manifold base only)Note 1) 10-SYJ3233 1/8 10-SYJ3 M5 x 0.8 3 position 58 56 66 10-SYJ3433 10-SYJ3533 Note 1) Dedicated for manifold base, refer to page 11 for details.

51

46 28 28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G H K L M N P Q R T U X Y1 Y2 Z Q2 Q3 Q4 10 29 22 19.5 14 4 0.004 0.016 9 0 0.036 1 7 9 0.5 16.5 9.5 3 M3 x 0.5 3.5 3.5 M3 x 0.5 10.6 3 31 25 17 41 15 34 25 21.2 18 5 0.004 0.016 12 0 0.043 1.5 6 10 0.5 19 10 3.2 M3 x 0.5 3.5 3.5 M3 x 0.5 12.6 3 36 29 21 48 20 42 34.5 25 20 6 0.004 0.016 14 0 0.043 1.5 8 10 0.5 25.5 13 4 M4 x 0.7 4.5 4.5 M5 x 0.8 16 4 44 36

MY1

Auto switch 84 Switch mounting groove MB-32-36-L8509 Mechanically Jointed Rodless Cylinder Series MY1HT Stroke Adjustment Caution Stopper bolt B (Shock absorber side) A (Stopper bolt side) 1.

CLQ

16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5 x 0.8 unlocking port (Unlocks when pressurized) Rod end male thread H1 Rod end nut H2 X C1 L1 Stroke range Without auto switch With auto switch Bore size (mm) A G L M U VH VV W E H I K Q S D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 20 25 36

A_HEC-OM-J017

32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30

HEC-OM-S008

2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Reading offset 2 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D Answer -1.52 deg.C 36 Offset setting (without

C95

40 36 43 36 9.5 7.5 4 63 63 31.5 6 47.5 45 48.5 45 52 45 9.5 6.5 4.5 80 80 31.5 6 55.5 53.5 56.5 53.5 60 53.5 10.5 5.5 5 100 100 Note) This is a standard including hysteresis, and is not guaranteed.

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Vacuum Pad

Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36

Vacuum Pad

Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36

TABLE OF CONTENTS

PORT 90 LEFT HIGH TEMPERATURE MOLDED COIL All Models except 56 Models 26, 36 ,76 All Models AN CONNECTOR MANIFOLD MOUNT 1/2 NPT EUROPEAN DIN STYLE COIL All Models All Models Models 26, 36 SPLICE BOX HOUSING FLANGE MOUNT 3.75 .34 All Models Models 26, 76 3.22 (95.3) 2.50 (8.6) BODY OPTIONSsee page 80 (81.8) (63.5) JIC HOUSING PORT 90 RIGHT METERING TO " ORIFICE Model 26 Models 26, 36, 76

Vacuum Pad

Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36

Vacuum Pad

Note) U P. 1 MU P. 2 Flat EU P. 5 AU P. 8 C Flat with rib P. 1 P. 1 P. 10 UT Thin flat (pad) CT Thin flat with rib Note) Note) B P. 1 J P. 13 Bellows (pad) MB P. 14 ZJ P. 16 D Deep AN Nozzle pad P. 9 MT Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36

High Power Cylinder Series RHC

Solenoid valve ( ): Effective area [mm2] : Metal seal Speed controller D 36 to 45 E 64.8 to 67 F 102.6 to 120 G 180 to 300 C 16.2 to 21.6 Composed effective area (mm2) 2 Standard type 1 With One-touch fittings Elbow type 1-A Refer to System Selection table, and the appropriate solenoid valve, speed control valve and bore size may be selected.

LEC-OM02704CN

ON OFF 4 36 4 (3) 0r/min (10ms) ON OFF ()ON MBR (MBR) OFF (ON) ALM (OFF) (ON) RX(n1)A RX(n3)A (OFF) . ON OFF (4) (10ms) 1560ms (1) 0r/min ON OFF 10ms MBR (2)ON (MBR) OFF (ON) ALM (OFF) (ON) RX(n1)A RX(n3)A (OFF) ON OFF 1.. 2.

LEC-OM069xx

MONITOR2 11 12 13 SEL_MON1/2 SEL_MON1/2 14 IO_MON 15 16 WDT RWDT 17 18 19 20 21 22 Subcommand Subcommand 23 area area 24 25 26 27 28 29 8-36 8 MECHATROLINK-II Commands (2) OPTION Field Specifications The option field is used to add functions to a motion command.

KG

Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.