NB Bore size (mm) S 73.5 74.5 MM GB GA C A 10 16 15 15 15 18.3 17 20 8 8 5 5 6.5 6.5 11 11 D GC B F H 28 28 NN NDh8 Z 101.5 102.5 45 45 20 20 WW WA WB NA 29.5 29.5 4 5 M4 x 0.7 M10 x 1.0 M12 x 1.0 12-0.027 10-0.022 22.9 22.9 0 13.4 13.4 0 M5 x 0.8 688 Air Cylinder CJ2 10-/1121-/22Single Foot (L): CJ2L, CJ2L 10112122Rubber bumper 6 GC GA F NN MM Piping port 3 x M5 x 0.8 Cover surface CA 9
) Note 10) Note 10) Note 10) Name plate and pressure gauge in imperial units: MPa Name plate, caution plate for bowl, and pressure gauge in imperial units: psi, F Note 1) Option G, M are not assembled and supplied loose at the time of shipment.
M M BN W V lC lB With rod boot e 8 f l ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 X 1.25 6 14 to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15
10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.
Digital Flow Switch For Air Series PF2A How to Order ZSE ISE Integrated display type PF2A7 10 01 27 PSE Flow rate range Z I SE3 Thread type Unit specifications 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Nil N F Rc NPT G Nil M Wiring specifications With unit switching function Fixed SI unit Note) PS 3 m lead wire with connector Without lead wire
-5 Gasket DXT192-10-5 (Use caution to the orientation.)
Example) VHS30-03-RZ 3 (R) 1 (P) Description Symbol Body size 20 30 40 50 Rc NPT G Nil N Note) F Note) Thread type + 01 02 03 04 06 10 H 2 x 10 1/8 1/4 3/8 1/2 3/4 1 Port size + D E F Flow direction: Left to right Flow direction: Right to left Nil R Flow direction a + Semistandard Lockable at the time of exhaust G Name plate in imperial units: MPa Name plate in imperial units: psi Nil Z Note
stations 10 Rc NPTF G NPT Nil T F N Suffix Non-leak/Medium vacuum/Oil-free Non-leak/Copper-free/Oil-free Note) NBR Nil V R Aluminum Oil-free Nil Z FKM Common port sizes are all Rc3/8.
To rotate the servo motor at 3000r/min in the open collector system (200kpulse/s), set the electronic gear as follows. f CMX CDV = N0 60 10 f : Input pulse frequency [pulse/s] N0 : Servo motor speed [r/min] 200 103 CMX CDV = 3000 60 10 CMX CDV = 3000 60 10 200 103 = 3000 10 60 20 = 15 6 4 11 4.
VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.
The minimum order quantity is 10 pieces. Order in multiples of 10.
L1 (mm) 400 a = 1000 Pitching Yawing Vertical Vertical m a a = 2000 200 a = 3000 L1 Mep 0 5 10 20 15 Transfer load m (kg) 600 a = 2000 a = 1000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 82 Non-standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth
5st 5 st 5 st 10 st 10 st 10 st 10 st 10 st M4 x 0.7 6 6 9 10 12 5 50.5 22 44.5 4 7 14 5 10 8.5 19 60.5 27 54.5 13.5 24 M4 x 0.7 14 5 53 23.5 47 4 10 15 6.5 12 8.5 20.5 63 28.5 57 13.5 25.5 M6 x 1.0 20 8 61 24.5 52 5 12 18 8 16 9.5 23.5 71 29.5 62 14.5 28.5 M6 x 1.0 24 10 67.5 27.5 57.5 5 14 20 10 20 10 27.5 77.5 32.5 67.5 15 32.5 Double clevis bracket material: Carbon steel For details
A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 50.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 59 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 Up to 300 20 to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 Up to 300 20 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 500
lor 9~re lock-
Setting of [F 0] Unit selection function completed Flow specification when [ Ft] is selected by unit selection function Model PFM710 PFM725 PFM750 PFM711 Dry air, N2, Ar 0.8 to 35.3 1.8 to 88.3 4 to 177 8 to 353 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Rated flow range CO2 0.8 to 17.6 1.8 to 44.1 4 to 88 8 to 176 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Dry air, N2Ar 0.8 to 37.1 1.8
, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)
depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88
for 3/8" M5 ihread (10-32 Nc Pilot valve sDecificatio I lP65 option (Y YZ only) ffi Sloited locLing (Too rype) connecior wih 300mrn lead wre Llvpe p ua terminalwithout lead wire M tvDe pluq conneclorw h 300mrn lead [,llvoe D]uq lermrnalwithoul lead w re Wth Manifold C . q F F t l vv3ozEl z EE series J | | f f i t I I I "," rair mount t f f i I Manilold type a I E g"dfi",1",r _l I Number of