CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

Digital Flow Switch (Integrated display type)

Setting of [F 0] Unit selection function completed Flow specification when [ Ft] is selected by unit selection function Model PFM710 PFM725 PFM750 PFM711 Dry air, N2, Ar 0.8 to 35.3 1.8 to 88.3 4 to 177 8 to 353 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Rated flow range CO2 0.8 to 17.6 1.8 to 44.1 4 to 88 8 to 176 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Dry air, N2Ar 0.8 to 37.1 1.8

5 Port Solenoid Valve

, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88

Title not found

for 3/8" M5 ihread (10-32 Nc Pilot valve sDecificatio I lP65 option (Y YZ only) ffi Sloited locLing (Too rype) connecior wih 300mrn lead wre Llvpe p ua terminalwithout lead wire M tvDe pluq conneclorw h 300mrn lead [,llvoe D]uq lermrnalwithoul lead w re Wth Manifold C . q F F t l vv3ozEl z EE series J | | f f i t I I I "," rair mount t f f i I Manilold type a I E g"dfi",1",r _l I Number of

Cylinder with Lock Series CNG

Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 14 8 20 to 200 18 15.5 13 38 93 1/8 44 8 12 2 85 10 18 5.5 6 4 5 to 200 26 16.5 10 20 to 300 22 19.5 17 45 103 1/8 52.5 10 14 2 96 10 25 6.5 9 7 6 to 300 31 20 10 20 to 300 22 19.5 17 45 104 1/8 57.5 12 18 2 97 10 25 6.5 9 7 6 to 300 38 301 to 500 26 12 20 to 300 30 27 19 52 112 1/8 66 16 25 2 104 10 (

Rotary Clamp Cylinders

0.15 17 17 10 0.07 0.15 2 x 4 x M6 x 1.0 4.5 C A R Q Through-hole/Both Ends Tapped Common (Standard) (mm) Clamp stroke 20 mm Clamp stroke 10 mm Bore size A B C Q R S Q R S 20 25 136.5 130.5 69 36 47 25.5 116.5 110.5 59 139 133 69 40 52 28 119 113 59 23 Rotary Clamp Cylinder: Double Guide Type Series MK2T Dimensions: 32, 40, 50, 63 E 4 x F A B E B D 10 D C A F C G Head End Flange (mm) With

CNG

Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 14 8 20 to 200 18 15.5 13 38 93 1/8 44 8 12 2 85 10 18 5.5 6 4 5 to 200 26 16.5 10 20 to 300 22 19.5 17 45 103 1/8 52.5 10 14 2 96 10 25 6.5 9 7 6 to 300 31 20 10 20 to 300 22 19.5 17 45 104 1/8 57.5 12 18 2 97 10 25 6.5 9 7 6 to 300 38 301 to 500 26 12 20 to 300 30 27 19 52 112 1/8 66 16 25 2 104 10 (

CNG

A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 50.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 59 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 Up to 300 20 to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 Up to 300 20 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 500

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

EXxx-OMY0006CN

PROFIsafe SI PROFIsafe 10 DIP ON SI DIP DIP F=0.3Nm Fbit No. 9 8 7 6 5 4 3 2 1 0 O N 1 2 3 4 5 6 7 8 9 10 F512 128 64 32 16 8 2 256 4 1 Fig. 10-7 PROFIsafe address switch : DIP DIP OFF 65 No.EX##-OMY0006CN 10.11.2.

JXCx-OMU0004

P.65 * ALARM 10 2 e M7 LED f h 3 h 15 7 LED f F g 7 LED f ON(LED a ON 8.1 P.40 10.P.50 25 No.JXC-OMU0004-A (4) 5 AB 2 3 7 LED f (A [1] h ( 3) 7 LED f h h *0F(15) 7 LED f LED a [2]LED a g LED b 7 LED f g 7 LED f g h g g [2]7 LED f C LED b ) g h F15 g 2 (B 26 No.JXC-OMU0004-A [3] i j * i j i j * i j 8.4 P.43 [4] g 1 g [5]7 LED f i 7 LED f j

Air Cylinder

JM-045 JM-10 JM-10 JM-045 JM-045 *Components include in a seal kit.

MB

H F ZZ + Stroke Standard model no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

l F K A N BN Hole dia.: CDH10 h + l Shaft dia.: CDd9 H S + Stroke ZZ + l + Stroke ZZ + Stroke Z + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C CDH10 CX CZ D E F GA GB GC GD GL GR H1 Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 10 +0.058 0 15 +0.3 +0.1 29.5 16 32 10 85 15 26 54 10 10 8 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52

Electric Actuator

Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:

2 Phase Stepper Motor/Without Motor Brake Series LXS

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Standard stroke range (mm) Long stroke range (mm) A H H1 I J K KA MM NA P TA ZZ AL B1 C D E S TB F GA GB 24 20 25 32 40 50 63 80 100 15.5 19.5 19.5 27 32 32 37 37 8 10 12 16 20 20 25 30 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 14 16.5 20 26 32 38 50 60 5 6 6 8 11 11 13 16 5 5.5 5.5 6 7 7 10 10 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 10(12) 35 40 40 50 58 58 71

CM2

X 1.5 NA 24 30 34.5 42.5 F 13 13 13 16 A 18 22 22 24 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 G 8 8 8 11 AL 15.5 19.5 19.5 21 H 41 45 45 50 B1 13 17 17 22 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 0 0.039 With rod boot h Symbol Bore 20 25 32 40 S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 f e Stroke 1 to 50 68 72 72 77