LJ1H

Lateral 0.2 0.1 200 300 500 100 Load point distance (mm) LJ1H20 LJ1H30 10 20 10 Lateral load 100% 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 1000 Horizontal load 50% Horizontal load 100% 1000 Horizontal load 50% 500 500 200 Amount of deflection (m) Amount of deflection (m) 200 100 100 50 50 20 20 10 10 Lateral load 100% 5 Lateral load 50% 5 Horizontal empty weight deflection

CNA

Same side (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 90 + 50 n = 4, 8, 12, 16, 100 + 50 n = 4, 8, 12, 16, 110 + 50 n = 4, 8, 12, 16, 75 + 50 (n 2) n = 2, 3, 4, 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8, 110 + 50 (n 2) n = 2, 4, 6, 8, 15 + 50 n = 2, 4, 6, 8, Different sides MNB n Same side CNA 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides CNS 2 Same side

CNA

100 75 80 90 75 80 90 100 100 100 1 Different sides 2 20Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, Different sides Data n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2

Cylinder with Lock

14 80 12 55 287 4.5 72 119.5 100 30 14 100 14 65 311 4.5 89 138.5 120 32 16 Bore size LS 32 193 40 211 50 234 63 246 80 297 100 321 Rod flange: MWBWF FT FE Port Cushion valve 4 x FD Fd FB FY FX FZ [mm] Bore size FB FD Fd FE FT FX FY FZ 32 56 7 30 3 10 72 38 87 40 65 9 35 3 10 83 46 101 50 77 9 40 2 12 100 52 120 63 92 9 45 2 12 115 62 135 80 100 12 45 4 16 126 63 153 100 120 14 55 4 16 150

CL

74.5 74.5 83 3 3.5 3.5 4 10 10 10 10 15 15 16 16.5 7 7 8 8.5 20 25 32 40 For long stroke, refer to page 9-2-32.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

C85

Pitch 0.5 0.5 0.5 0.5 8, 10 12, 16 20 25 JA10-4-070 JA15-6-100 JA20-8-125 JA30-10-125 4 6 8 10 7 10 13 17 5.5 7 8 9 0.054 0.123 1.1 2.5 0.7 1 1.25 1.25 26 34.5 44 49.5 9 12.5 17.5 19.5 1.5 2 4.5 5 10 14 12 16 21 24 4 6 7 8 4 5 7 8 6-11-20 6-11-20 20 Series C85 ISO Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Auto Switch Mounting Position and Mounting Height [First

C85

A 10 3 (3.5) 4 (4.5) 4 (5) 7 (5) 8.5 (6.5) 8 10 12 16 20 25 ( ) for air cushion type.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Motor Brake Series LXP Dimensions/LXPB2BD Scale: 30% The dimension inside [ ] shows the location at which the home position switch operates. 9 10 [16.5] 10 21.5 4-M6 x 1 depth 10 Section C 18 7.5 Section F B 4-M6 x 1 4.5 1 30.5 34 47.5 4-9.5 4-5.6 +0.1 0 8.4 5.4 34 0.02 78 91 94 64 50 10 B 4H9 +0.030 0 depth 6 26 63 73 30 D Stroke + 181 (Stroke: 50 to 100 mm) Stroke + 198 (Stroke: 125 to

CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

CM2

(n 2) n 2 2 20 + 50 ( ) (n = 2, 4, 6) D-B59W 15 75 20 20D-A3A D-G39A D-K39A D-A44A 35 + 30 (n 2) 10 100 35 100 + 100 (n 2) Data 6-4-27 28 Series CM2W Air-hydro With Air Cushion CM2WH Mounting style Bore size Stroke Rod boot CM2W Mounting style Bore size Stroke Rod boot A With air cushion Air-hydro The cushion mechanism is provided for covers in both sides to absorb the impacts when operating

MNB

50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

VFS

P D Nil D side mounting None 01T, 10 1 2 Rc Rc Rc M Mixed U 01C, 01F 3 4 3 4 U side mounting For bottom ported, Rc is only available.

High Vacuum Angle Valve

pressure (Pa) (abs) 1 x 10-6 to atmospheric pressure Main exhaust valve 800 300 200 160 45 14 80 Conductance (L/s) Note 1) Initial exhaust valve 6.5 to 31.5 6.5 to 31.5 4 to 18 4 to 18 2 to 8 0.5 to 3 2.5 to 11 In case of standard material FKM: 1.3 x 10-10 at normal temperature, excluding gas permeation Internal Leakage (Pam3/s) In case of standard material FKM: 1.3 x 10-11 at normal temperature

NCQ8

(lbf) 1 100 400 (4") 300 (3") 075 056 0.1 200 (2") 250 (2 1/2") 10 150(1 1/2") 106(1 1/16") 075(3/4") 0.010 0.5 1 1.5 2 2.5 3 3.5 4 1 Cylinder stroke (inch) 056(9/16") With Auto Switch 0.1 1 10 100 100 Allowable lateral load for rod end : W (lbf) Piston speed (inch/sec) 400 300 250 200 150 106 075 056 10 1 0.1 0.01 0.5 1 1.5 2 2.5 3 3.5 4 0 Cylinder stroke (inch) With Auto Switch, Super Compact

CNA

+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) n=2, 3, 4, 5, 100+100(n-2) 100+100(n-2), n=2, 4, 6, 8, Same 10 90 100 110 With 1 10 75 80 90 Different 20 75 90 90 100 100 110 110 With 1 With 2 With n Same Different 20 55 75 75 80 80 90 90 With 2 With n (n-4) 90+50 2 n=4, 8, 12, 16 (n-4) 100+50 2 n=4, 8, 12, 16 (n-4) 110+50 2 n=4, 8, 12, 16 (n-2)

MXQ

MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-