Table of Contents

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-

7.5

8.2 16 18 20.5 16 16 18 20.5 17 32 35 39 31.5 32 35 39 3 6 8 10 5 6 8.5 10 When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

Miniature Regulator Series ARJ210

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 Miniature Regulator Series ARJ310 F.R.L.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

8.2 16 18 20.5 16 16 18 20.5 17 32 35 39 31.5 32 35 39 3 6 8 10 5 6 8.5 10 When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6 [49.6] Approx. 300 Pg7 91.9 [94.1] 101.9 82.1 [84.3] 91 83.6 77.1 61.1 35 35 35 35 28.3 28.3 28.3 28.3 21 21 21 2-3.2 (For mounting) 25 21 2-3.2 (For mounting) (3.6)

0.55

14.8 [4(A), 2(B) port] Manual override 2B 2B 26.4 20 12 10 4A 4A (1.6) G: Approx. 300 H: Approx. 600 (Lead wire length) 40.7 (6) 65.4 (AC: 67.6) (Distance between ports) (13.4) (Indicator light) (10) 3EB (E type) 14.5 6 (AC) 38.6 42 (55) (45) 35 35 19.6 17.5 5EA M5 x 0.8 12 11.8 (16) 2 x 5.5 [5(EA), 3(EB) port] 30 (For mounting) (26) 1P 12.5 1 2.3 17.8 M5 x 0.8, 1/8" [1(P) port] (PE port)

0.55

Refer to back page 6 for changing the type of actuation. Manifold Option Description Part no.

PFxx-OMX0002

Refer to the switch output modes list for the relationship between the set values and operation (page 35).

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

44

Width across flat Width across flat Effective area (mm2) Weight (g) L M d 3 x Applicable tubing Model H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 d 4 4 6 8 10 10 12 12 16 KFG2T0425-00 KFG2T0403-00 KFG2T0604-00 KFG2T0806-00 KFG2T1075-00 KFG2T1008-00 KFG2T1209-00 KFG2T1210-00 KFG2T1613-00 1.6 2.6 6 17 30 35 45 57 101 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 11 10 18 39 67 65 71 67 122 7 8 13.3 5 H2 H2 H2 H1 M

Ionizer

Minimum bending radius: Power suppy cable, connection cable A 35 mm Sensor cable, connection cable B25 mm 6. Do not affix any tape or seals to the body.

Direct Operated

CAT.ES70-26 B Direct Operated 3 Port Solenoid Valve For Air, Water, Oil, Steam Reduced power consumption (DC specification) Reduced Reduced power consumption power consumption (DC specification) (DC specification) 6 6 W 4. 4.5 W 6 W 4.5 W 8 8 W 7 W 8 W 7 W 11.5 1.5 W 10. 0.5 W 11.5 W 10.5 W Series VX31/32/33 3 VX3 New New 3 Reduced power Reduced power consumption consumption (DC specification

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Indication symbol Symbol AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8"

Water-cooledThermo-chiller

Outlet pressure [60 Hz] 75 75 60 60 Outlet pressure [50 Hz] 45 45 30 30 Return port pressure Return port pressure 15 15 0 0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 0.53 gpm (2 L/min)., the shutdown alarm activates and operation stops.

Dual Speed Controller with One-touch Fitting Series ASD 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Digital Flow Switch ( compatible)

(page 84) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2 [68.2] Approx. 300 (Lead wire length) Pg7 6 6 6 6 107 [111.4] 87.4 [91.8] 65.2 58.7 18.7 45.5 45.5 45.5 45.5 105.2 17 17 17 17 17 17 17 17 42.7 127 2.7 6 6 6 6 25.2 32.6 8.5 8.5 8.5 8.5 42.6 43.5 21.5 21.5 21.5 21.5 23.7 [25.9] 33.5 [35.7] Refer to the