SMC Corporation of America
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. * Air purification rating: JIS B 8392-1 (ISO8573-1) Quality Degree 4, 4, 2 or more Bernoulli type XT661 X321 4C Outer body diameter: 4C 39 mm 6C 59 mm 8C 79 mm 10C 99 mm 4C 6C 8C 10C 120E 150E Bernoulli type Outer body diameter (mm) 39 59 79 99 l120 l150 Piping port size M5 x 0.8 Rc 1/8 XT661 X322 120E Fluid Air* Operating pressure 0.01 to 0.4 MPa Body size: l Proof pressure 0.6 MPa Ambient

ZPY02U--A8 ZPY2004U 10 11 1 2 1.2 0.3 4 2.6 4.6 2 2.6 1.2 ZPY13UT ZPY04U--A8 ZPY3507U 13 14 3.5 1.8 0.5 7 4.3 7.8 4 4.8 1.6 0.8 1.5 ZPY16UT ZPY06U--A8 ZPY4010U 16 17 4 2 0.8 10 5 11 6 7 2.5 2.5 ZPY10CT 10 11 0.8 ZPY08U--A8 8 9 1 ZPY13CT 13 14 Dimensions by Stroke 1 ZPY16CT 16 17 4 tube 6 tube E F D Model G H J G H J ZPYU16--A8 63 15 37 ZPYU10--A8 94 40 15.5 2.5 7 12.5 1.8 5 ZPYU15--A8 45 99

W Horizontal lifting 13-11-99 Series ZPT/ZPR Component Parts Series ZPT Series ZPR Pad Diameter: 10 to 32 Pad Diameter: 10 to 32 r Buffer r Buffer t Adaptor e Adaptor q Pad q Pad With buffer With buffer Pad Diameter: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Setting of slave addresses for simple communication protocol Setting range: 1 to 99 to Setting/Checking: Communication speed (simple communication protocol) 15. Press the [SEL] key once. Setting screen of communication speed (simple communication protocol) is displayed on the digital display. PV SV 16.

Setting of slave addresses for simple to communication protocol Setting range: 1 to 99 Setting/Checking: Communication speed (simple communication protocol) 15. Press the [SEL] key once. Setting screen of communication speed (simple communication protocol) is displayed on the digital display. PV SV 16.

Flange Flange tightening bolt Table 3 Tightening torque Bore size (mm) Tightening torque (Nm) 125 30.1 160 99 200 99 250 193.5 74 8-7-1. Disassembly of the rod boot (1) Loosen the mounting screw for rod boot mounting band A and B. (2) Remove the rod boot. 8-7-2.

Setting of slave addresses for simple communication protocol Setting range: 1 to 99 to Setting/Checking: Communication speed (simple communication protocol) 15. Press the [SEL] key once. Setting screen of communication speed (simple communication protocol) is displayed on the digital display. PV SV 16.

The step No. of program which is being performed is displayed. 0 to 120 18 Settling time The settling time is displayed. 0 to 999 ms 19 Oscillation detection frequency The frequency at oscillation detection is displayed. 100 to 4500 Hz 20 Tough drive times The times moving to the tough drive are displayed. 0 to 99 times 79 - 6.

Precautions for wiring and cable . 99 19. Electric Actuators/Common Precautions . 100 19.1 Design and selection . 100 19.2 Mounting . 101 19.3. Handling Precautions . 102 19.4 Operating environment . 103 19.5 Maintenance Precautions . 104 19.6 Precautions for actuator with lock . 104 20.

M4 16 - (1)D (100 ) (2)2mm 2 D (3) 40 30mm 50mm ()60mm 0mm 16 *LEH 10mm 25 30mm 30mm 50mm DIN 60mm 17 - 4 4.1 Node Address/Data Rate 1 DeviceNet MSD LSD Data Rate *1 PGM DeviceNet *2 010 *3 PGM DeviceNet Node Address MSD LSD Data Rate Node Address Data Rate MSD LSD 0 125kbps 10) 1) 1 250kbps 0 0 0 2 500kbps 0 1 1 3 PGM *1 0 2 2 9 6 2 62 6 3 63 6 4 PGM *1 9 9 2 PGM 64-99

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/