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8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/4, 3/8 Electrical entry 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Grounding Be sure to ground the product (PE). Do not share the ground with equipment that generates strong noise or high frequencies.

L03 L02 L01 9.5mm 2 1.25mm () L ,N N L () () M5 () 9.5mm 2 1.25mm M4 () (M3) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE: LN: LN

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

SX3000-38-2A Port size Port size M5 x 0.8 SX3000 M5 x 0.8 SX3000 SX5000 1 8 Note) The EXH port may be either on the lead wire side or on the end plate side. SX5000-38-16A SX5000 1 8 Note) SUP port may be either on the lead wire side or the end plate side. (Factory assembled spacer will be shipped with the orientation shown in the figure.)

(mounting hole) 4 x M5 (mounting hole) Position indicator LED M3 Ground terminal Position indicator LED LINK OUT GATEWAY UNIT EX500 SERIES IN EX500 SERIES GATEWAY UNIT (M12, 5 pins, socket) LAN PE PE PWR PWR LINK LINK SOL 100 L RUN OUT Power source connector Note 1) MS L ERR.

9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 5 IDX-OM-U021 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 6 IDX-OM-U021 2 2 2-1 45 45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-2 2-2

: 1.25mm 2 or more PE Terminal block for Transformer Terminal block for signal 1 1 2.

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5

Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5

Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30, IDF55E-30, (Single phase AC200V) IDF75E-30 (3 phase AC200V) L N PE L1 L2 L3 PE Customer Connection Side Customer Connection Side Terminal Connecting Screw: M3 Terminal Connecting Screw: M3 Applied Pressure Terminal: 1.25-3 Applied Pressure Terminal: 1.25-3 (Width 6.5mm and below) (Width 6.5mm and below) IDF Series 1-1 Parts Name and Functions

8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 M5 M5 AMR 1 4 2 1 (5) (5) Weight (kg) 0.15 0.18 0.2 0.3 0.5 1.4 2 4 ITV Note 1) No condensation.

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

For option B, screws for breaker terminal are M5.(screw of PE terminal is M4) 3. Connect the other end of the cable to the crimped terminal that is compatible to the secondary side of the earth leakage breaker. L L N N PE Cable Diameter: 8.5 to 11.5mm Earth leakage breaker (Secondary side) PE(Earth) Crimped terminal (Prepared by customer) Thermo chiller side, Crimp terminal 3pcs.

For option B, screws for breaker terminal are M5.(screw of PE terminal is M4) 3. Connect the other end of the cable to the crimped terminal that is compatible to the secondary side of the earth leakage breaker. L L N N PE Cable Diameter: 8.5 to 11.5mm Earth leakage breaker (Secondary side) PE(Earth) Crimped terminal (Prepared by customer) Thermo chiller side, Crimp terminal 3pcs.

Stroke + 246 75.5 59 LXSH S B Q F G x I Without brake 5H9 +0.030 0 depth 5 D-5.1 through Refer to Cross section C-C, bottom view. 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 32 5 M3 x 4l E-M5 2-M3 x 0.5 Effective thread depth 4 (PE terminal) 6 Thread depth 10 Crimping terminal 38 76 46 Toothed lock washer (included) Motor wire (300mm) Photo micro sensor wire (300mm) Phillips