MY2

Port variations Applicable cylinder MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 40 Series MY2 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 1. Confirm the specifications.

CG5-S

Yellow (Y) Yellow (Y) T1613 is on a reel.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

MB

Bore size (mm) Part no. l m L d Dd9 H B C D Applicable cotter pin CJ1 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) When using cotter pin, flat washer is used together.

Fluoropolymer Piping Equipment

(E) Class 6 Class 2 to 5 Metric sizes Inch sizes Connection threads Rc/NPT E H L M Min. port size W Y Connection threads Rc/NPT E H L M Min. port size W Y Model Applicable tubing O.D. Model Applicable tubing O.D.

CG5-S

Yellow (Y) Yellow (Y) T1613 is on a reel.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

e

Coordinates and moments Load mass and static moment Horizontal mounting Wall mounting Ceiling mounting z M1 M3: Yawing M2 M3 M1 M2 M2 y m1 x g X x z Y y m2 x g m3 x g x X x X Z Y M1: Pitching Horizontal mounting Ceiling mounting Wall mounting m1 m2 m3 Mounting orientation y Static load (m) x M2: Rolling m1 x g x X m1 x g x Y m2 x g x X m2 x g x Y M1 m3 x g x Z m3 x g x X g: Gravitational

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No. Description Material Note Component Parts (For single acting) No.

HRS100/150

/L] 0.1 or less v Iron (Fe) [mg/L] 1.0 or less v v Residual chlorine (Cl) [mg/L] 0.3 or less v Reference item Copper (Cu) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Sulfide ion (S2) [mg/L] Should not be detected. v * In the case of [Mcm], it will be 0.003 to 0.01.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

L F9NWL 5m...

Compact Cylinder with Lock Series CLQ

Double clevis pins and retaining rings are included. 831 Rod end nut L1 Series CLQ Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 Hole: ND H10 Shaft d9 Hole: ND H10 Shaft d9 MM MM L NDH10 MM NDH10 MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ

Programless Controller Series LECP1

Dot color COM + 1 Black Light brown COM 2 Red Light brown 3 OUT0 Black Y ellow 4 OUT1 Red Y ellow 5 OUT2 Black Light green 6 OUT3 Red Light green 7 BUSY Black Gray 8 ALARM Red Gray 9 IN0 Black White 10 IN1 Red White 11 IN2 Black Light brown 12 IN3 Red Light brown 13 RESET Black Y ellow 14 STOP Red Y ellow Parallel I/O signal is valid in auto mode.

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

Electric Actuator

Table Displacement (Reference Value) W L 0.08 LEF32 (L = 30 mm) 0.06 Displacement [mm] LEF25 (L = 25 mm) 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 0.02 0 0 100 200 300 400 500 Load W [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

NCA1

4 1 3/4 1 5/8 7 3/4 2.59 4 1/4 2.72 8 1/2 400 (4) 1 3/8 1-14 1 5/8 4.7 2 5/8 1 1/4 3/4 3/4 1 1/4 3/8-24 4.5 0 1/2 5/8 5/8 1.57 1.18 1 1/4 1 3/4 1 5/8 7 3/4 2.59 4 1/4 2.72 8 1/2 Oversized Rod Single Detachable Rear Clevis Type NC A1C (XB5) Bore S 200 3/4 250 3/4 325 1-1/16 400 1-1/16 X119 Option (in) Bore (in) MM KK A AA B C CB CD CW D DD E EA EE F FA G J L LR M WF XD Y LF P ZD 200 (2) 1

ZP

Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10