HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Fieldbus System

N.O. 3-position closed center Note) Only rubber seal type 2(B) (A)4 3 D: Slide locking type (Manual) Seal type (R1)5 1 (P) 3(R2) 0 Metal seal 1 Rubber seal 3-position exhaust center 2(B) (A)4 4 Function Nil Standard (0.4 W) B Quick response type (0.95 W) K Note 2) High pressure type (1.0 MPa, 0.95 W) N Note 3) Negative common R Note 4) External pilot (R1)5 1 (P) 3(R2) 3-position pressure

PFxx-OMY0005

U8 0 Y 1090 0x0442 0 R/W 3: bar 4: psi 0: FLoW (Flow rate) 1: Temp (Temperature) 2: PrES (Pressure) 3: AC (Accumulated) 4: PLS OUT1 setting OUT1 (Select the target for setting) 1200 0x04B0 0 R/W U8 0 Y (Accumulated pulse) 5: Err (Error output) 6: oFF (Output OFF) ModE1 (Selection of output mode) 0: HYS (Hysteresis) 1: Wind U8 0 Y 1 R/W (Window comparator) 1210 0x04BA 1ot (Selection of output

Air Cylinder Series CM2

CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W 12 Bumper Urethane Seal kit includes @6 and @7. Order the seal kit, based on each bore size. (Except #3.) Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

ZP

Buffer connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 4 ZP U6 B8 Y [q Type Y adaptor] B 3 ZP K20 [w Buffer] Refer to 2 to 8 for Thin flat, Thin flat with ribs, and Elliptic. 13-11-64 Series ZP Made to Order Specifications: Please consult with SMC for detailed specifications, dimensions and delivery. 1.

Aluminum High Vacuum Angle Valve

100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

VFR

1, Metal joint q, w, Gasket A e, Guard !3 !1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Electric Grippers

3 w t r q Step Motor (Servo/24 VDC) y u i o !2 !0 Component Parts No.

Thermo-chiller

3 w Parts List (170) No.

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

4-channel Flow Monitor ( compatible)

of PF2A5. 0: 10 L 1: 50 L 2: 100 L 3: 200 L 4: 500 L rAnG (PF2A5, Selection of connection range) Y U8 0x00 1 R/W (0) Set the connection range of PF2W5. 0: 4 L 1: 16 L 2: 40 L 3: 100 L 4: 250 L rAnG (PF2W5, Selection of connection range) Y U8 0x00 2 R/W (0) Set the connection range of PF2D5. 0: 4 L 1: 20 L 2: 40 L rAnG (PF2D5, Selection of connection range) Y U8 0x00 3 R/W (0) 0: PFA (PF2A5

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Table of Contents

24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model

ZP

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

1

121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 C6 1 0 3 EX260 SY SV VQC S0700 q w r e t y u i o !0 !1 !2 !3 Top ported y Pilot valve option !

LEC-OM02704CN

( ) W W L 11 L 1 2 B1 B 2 N C C P (2) CN1 CC-Link ((3)) BU BV BW OHS1 OHS 2 .