High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Servo Motor Controller (24 VDC)

Please wire referring to the following diagram * NPN type * PNP type A1 COM CN5 I/O signal power 24VDC A1 COM CN5 I/O signal power 24VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load B3 OUT2 Load

CG5-S

WH 32 (E1) D 21 19 17.3 41.4 6.4 7/16-20 126.4 I 40 19 16.6 17.3 41.4 6.4 7/16-20 134.4 B2 BZ MM AL A 50 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 Plug bolt (4 pcs. included) K KA 8-J 63 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 (F1) C 0.1 80 S + Stroke ZZ + Stroke H 25.4 22.9 23.9 63.5 9.7 5/8-18 193.5 NA 100 31.8 29.3 27.8 69.9 10.7 3/4-16 200.9 80 and 100mm-X165US are a future release.

CJ5-S

Note 2) A grease pack (GR-R-010, 10 g) is included in seal kits. 10-14-12 13 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic style (B): CG5BNS : With rubber bumper GA GB 2-Rc P H1 Width across flats B1 M BM (E1) D I I RE A B MM BZ B2 AL A K KA REC (F1) Plug bolt (4 pcs. included) C 0.1 8-J S + Stroke ZZ + Stroke H NA CX CY Bore size (mm) Stroke range A AL B1 B2 BM BZ C D E1 F1

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

CJ5-S

Note 2) A grease pack (GR-R-010, 10 g) is included in seal kits. 10-14-12 13 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic style (B): CG5BNS : With rubber bumper GA GB 2-Rc P H1 Width across flats B1 M BM (E1) D I I RE A B MM BZ B2 AL A K KA REC (F1) Plug bolt (4 pcs. included) C 0.1 8-J S + Stroke ZZ + Stroke H NA CX CY Bore size (mm) Stroke range A AL B1 B2 BM BZ C D E1 F1

1

Series CBA2 B port C port A port Atmospheric release port NCM Bore size (mm) ZZ S Q NCA B2 + Stroke S2 B1 + Stroke S1 40 230 168 53 A + Stroke (S1 + S2) 50 249 180 59 D63 268 196 61 80 320 232 73 -X Stroke B Stroke A 100 341 252 79 S + Stroke (A + B) Series MB The above diagram shows head side lock type and manual releasing nonlock type.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Pressure Sensor for General Fluids

A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 Adapter with throttle ZS-31-X Model No.

Digital Pressure Switch

1x10-10 Pam3/s Analogue output Voltage output Current output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101.0 kPa Compound -100.0 to 100.0 kPa -100 kPa 100 kPa -0.100 to 1.000 MPa -0.1 MPa 0 1 MPa Positive pressure -0.100 to 2.00 MPa -0.1 MPa 0 2 Mpa : Analogue output is 0.8 [V] or 3.2 [mA] at the pressure A. -51No.PS-OMM0003-J Dimensions Z/ISE80(F)-02/N02/F02/C01/A2/B2

C95

L1 L L2 d1 CD MR d2 R1 E2 UB CB 45 51 64 74 94 113 26 28 32 40 50 60 32.5 38 46.5 56.5 72 89 22 25 27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2

MK

MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B ML1C REA Calculation for Moment of Inertia I: Moment of Inertia (kgm2) m: Load weight (kg) REC qThin bar Position of rotary axis: Vertical to the bar and through the end rThin rectangular plate Position of rotary axis: Vertical to the plate and through the end RHC a22 3 I = m1 + m2 4a12+b2 12 4a22+b2 12 I = m1 + m2 a12 3 MTS CC wThin bar Position of rotary

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

N'Y'VFS.1IDP-mT-2 Body type Plug-in type Non plug-in type ~~np NARBF3050-NO-Pl NARBF3050-NO-P2 =~A NARBF3050NO-Al NARBF3050-NOA2 =,. r lionS NARBF30SO-NO-B-l NARBF30SO-NO-B2 Body type Part No. Note) For pressure center type valves, use pin NARBF3000.

Electric Actuators

Parallel I/O Connector: CN5 Wiring diagram LECP6Nll-l (NPN) LECP6Pll-l (PNP) Power supply 24 VDC for I/O signal CN5 Power supply 24 VDC for I/O signal CN5 A1 COM+ COM+ A1 COM COM A2 A2 A3 A3 IN0 IN0 A4 A4 IN1 IN1 A5 A5 IN2 IN2 A6 A6 IN3 IN3 A7 A7 IN4 IN4 A8 A8 IN5 IN5 A9 A9 SETUP SETUP A10 A10 HOLD HOLD A11 A11 DRIVE DRIVE A12 A12 RESET RESET A13 A13 SVON SVON Load Load B1 B1 OUT0 OUT0 B2

NARM Series

-P10-N01 Blanking plate kit 136114A 136214A (plate, screws, and o-ring) Manifold base, 13612-*-N 13622-*-N Common IN (A1, A2) Manifold base, 13613-*-N 13623-*-N Individual IN (B1, B2) * Denotes number of stations: 2~10 available. 10 10 station NARM2000-4B2 Note1) In case of A1 and B1, a pressure gauge or a plug is mounted at the body side, while in case of A2 and B2, at the manifold side.

Card Motor

NC NC A9 A9 Main circuit Main circuit NC NC A10 A10 24 VDC power supply for the output signals 24 VDC power supply for the output signals DC2 (+) DC2 (+) B1 B1 DC2 () DC2 () B2 B2 Load BUSY BUSY B3 B3 Load Load ALARM ALARM B4 B4 Load Load OUT0 OUT0 B5 B5 Load Load OUT1 OUT1 B6 B6 Load NC NC B7 B7 Maximum output current 10 mA Maximum output current 10 mA NC NC B8 B8 NC NC B9 B9 NC NC B10

NARM Ser ies

-P10-N01 Blanking plate kit 136114A 136214A (plate, screws, and o-ring) Manifold base, 13612-*-N 13622-*-N Common IN (A1, A2) Manifold base, 13613-*-N 13623-*-N Individual IN (B1, B2) * Denotes number of stations: 2~10 available. 10 10 station NARM2000-4B2 Note1) In case of A1 and B1, a pressure gauge or a plug is mounted at the body side, while in case of A2 and B2, at the manifold side.

48

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Insulation color Connector pin no.

Electric Slide Tables

B2 OUT1 OUT1 Load Load B3 B3 OUT2 OUT2 Load Load B4 B4 OUT3 OUT3 Load Load B5 B5 OUT4 OUT4 Load Load B6 B6 OUT5 OUT5 Load Load B7 B7 BUSY BUSY Load Load B8 B8 AREA AREA Load Load B9 B9 SETON SETON Load Load B10 B10 INP INP Load Load B11 B11 SVRE SVRE ESTOP ESTOP Load Load B12 B12 ALARM ALARM Load Load B13 B13 Input Signal Output Signal Name Details COM+ COM Name Details OUT0 to OUT5 BUSY