F

KQL11-37S 17.46 17.9 17 25.5 35.5 36.5 21 7 59 1/2 1/4 KQL13-35S 17.46 21.7 17 28 31.5 36.5 22 9 28 1/2 3/8 KQL13-36S 17.46 21.7 17 28 33.5 38.5 22 9.6 36 1/2 1/2 KQL13-37S 22.23 21.7 17 28 37.5 40 22 9.6 62 P R O D U C T S E L E C T O R H E X A G O N S O C K E T H E A D M A L E C O N N E C T O R : K Q S ( K Q 2 S ) Applicable Thread Model H D L A M Effective Weight Tube OD R(PT) (Hex) 0rifice

2 Phase Stepper Motor/Without Motor Brake Series LXS

J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5BD-50B LXSH5BD-75B LXSH5BD-100B LXSH5BD-125B LXSH5BD-150B Refer to page 301 for mounting.

0.4

B 2-position double (Metal) 4-position dual 3-port valve (B) 2(B) 4(A) VQZ 2(B) (A)4 K Note 2) Note) B: Locking type (Tool required) B N Note 3) R Note 4) SQ (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) Note 1) When two or more symbols are specified, indicate them alphabetically. However, combination of B and K is not possible.

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

LVQ

25.5 B 46 C 31.5 D 58 M 7 N 15 T 34.3 U 10.6 V 7 Model LVQ2 -Tm-2 LVQ3 -Tm-2 LVQ4 -Tm-2 LVQ5 -Tm-2 LVQ6 -Tm-2 2 1 2 1 25.5 51 31.5 63 7 15 36.9 16.5 10 2 1 25.5 51 31.5 63 7 15 37.9 22 10 2 1 38 76 44 88 7 20 64 25 17 2 1 38 76 44 88 7 20 64 32 17 577 Manual Type Tube Extension Fitting Type Series LVQH-T How to Order LVQH 2 0 07 1 T Option Body class Symbol Note Nil K N Orifice dia. 4 8 10

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;n;ngISedes Msi 0 t \ Width across flats 7 u Width aCross flats 7 2 ! '" ~ ~j,. >1 ~ 'K ~ .:!A.. ,8 ~ ,-B,! 'L (mm) ,L (mm) . G :M5XO.B G:Milx :~xl2!i y --:l . Model M .8 C 0 E F F F .K .L 'ZPY258 '25 27 .24 a4. 54 5 6 8 fS.6 ' 28' to. 5 ZPY32B 32 34 29 39 59 18.9 37 14 Model .K "L Y ZPY20B 20 22 23.5 33.5 53.5 12.4 25 10.5 -H;+~ 2 . 5 4 5 4 Applicable tube Abolic

Modular F.R.L. Unit

Port size Attachment Body size Port size Symbol Port size for intermediate air release Attachment mounting position 20 25 30 40 50 55 60 Symbol Applicable model Description 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC20 to 40 AF+AR+[K]+AL K Check valve AC20A to 40A AW+[K]

LX

J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5BD-50B LXSH5BD-75B LXSH5BD-100B LXSH5BD-125B LXSH5BD-150B Refer to page 301 for mounting.

Mechanically Jointed Rodless Cylinder Series MY1

head taper plug) A N Rc 3/8 (Port) Z + Stroke Rc 3/8 (Hexagon socket head taper plug) 2 x 2 x J depth K (WW) (WW) Rc 3/8 XX XX (Hexagon socket Rc 3/8 (Port) head taper plug) VV VV (Hexagon socket head taper plug) 2 x Rc 1/4 2 x Rc 1/4 (Hexagon socket head taper plug) MY1CG MY1CG (mm) NE A B C G GA GB H K J LD L LK LW M MM N NC Model LH LL 200 17 10.5 27 25 37.5 107 28 M14 x 2 11 200 2 128

Air Slide Table

Data may be erased. 2.

Battery-less

Size Order no. 20 16 LE-D-2-7 25 LE-D-2-2 32, 40 LE-D-2-3 Replacement Parts/Grease Pack Applied portion Order no.

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M Dllferent surfaces 35 301" 2) 110 + 30(n 2) D-A44 l< + (" = 2. 4. 6. 8.. ) o ~_+-_+-~L-_+ :: Same surface 55 55(" 2) 110 "t' 50(n 2) !i I + (" = 2. 4. 6. 8 .. ) With I pc. 15 "0 With 2 pes.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

Basic type / Direct mount type Series CY3B/CY3R

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB T 4 x counter bore dia.

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

New

B1 A B 2 x P 1(IN), 2(OUT) port 2 x M5 Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge

Air Cylinder

EA MM MM UV B B A A R0.03 E R C K TT G G WF + Stroke WF LD + Stroke 1.00 1.00 TM ZM + 2 x Stroke (in) UV Y P LD ZM TM D E R AA Bore (in) TT WF EA A G K MM C XI UM DD KK B EE 2 1.71 2.36 3.78 5.78 2.5 9/16 2 1.43 2.02 150 (1.5") 1.18 1 0.3 3/4 1.26 0.281 5/8 3/8 2.89 4.5 1/4-28 7/16-20 1 1/8 3/8 2.56 1.71 3.82 2.40 5.82 3 9/16 2 1/2 1.84 2.6 200 (2") 1.18 1 0.3 3/4 1.26 0.343 5/8 3/8 2.91

Fieldbus System

(0.95 W) High pressure type (145 psi (1.0 MPa), 0.95 W) Negative common External pilot (P) B 2-position double (Metal) 2(B) (A)4 K Note 2) B: Locking type (Tool required) N Note 3) R Note 4) 1 (P) (R1)5 3(R2) 2 Note 1) When two or more symbols are specified, indicate them alphabetically.