Fieldbus System L1 = 10.5 x n1 + 135.5 + 47 x n2 L2 = 10.5 x n1 + 42 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 82 L3: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 185.5 198 210.5 223 223 235.5 248 260.5 273 285.5 285.5 298 310.5 323 335.5 348 348 360.5 373 385.5 398 410.5 423 235.5 248 248 260.5
2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 95 + 100 (n2) n = 2,4,6,8... 100 + 100 (n2) n = 2,4,6,8... 105 + 100 (n2) n = 2,4,6,8... 110 + 100 (n2) n = 2,4,6,8... 90 + 30 (n2) n = 2,4,6,8...
+ 30 (n2) n = 2, 4, 6, 8 70 + 50 (n2) n = 2, 4, 6, 8 75 + 30 (n2) n = 2, 4, 6, 8 80 + 30 (n2) n = 2, 4, 6, 8 85 + 30 (n2) n = 2, 4, 6, 8 75 + 50 (n2) n = 2, 4, 6, 8 80 + 50 (n2) n = 2, 4, 6, 8 85 + 50 (n2) n = 2, 4, 6, 8 90 + 30 (n2) n = 2, 4, 6, 8 90 + 50 (n2) n = 2, 4, 6, 8 90 n (Different sides) D-A44 n (Same side) 1 2 (Different sides or Same side) 1 70 75 80 85 105 80 110 115 115 60
EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.
For the dimensions of the motor mounting position, refer to the dimensions on page 70 for the guidelines for assembly and designing. 80 46 (2 x n1)-6.6, Drill through 13, counter bore depth 6 5 thread depth 4 4-M2 x 0.4 Photo micro sensor 12 (Groove depth 1) E D Proximity sensor 7.5 Stroke + 96 (Table movement range) (25.5) 97.5 4.5 1 60 2 x n2-M2.6 x 0.45 4-C3 PCD3 56 8 4 5.8 3.3 thread
EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.
) (Station 1) Light/surge voltage suppressor (Station n1) (Station 1) With option 60 45.5 37.5 10 74.5 (For DIN rail mounting) (7.5) 11.8 n1 = Valve stations n2 = Input block stations Individual EXH spacer Individual SUP spacer L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 L1: DIN rail overall length Valve stations (n1) 2 3
Modular type 10 1000 1 L/min Modular type 2 L/min 20 2000 Modular type 5 Flow Switch Variations / Basic Performance Table PFMV PF2M7(-L) PFMB PF3A7 H(-L) PFMC(-L) PF2A Fluid Series PFMV3 PFG300 PFG300 PFG300 Enclosure IP65 [Monitor unit IP40] IP65 [Monitor unit IP40] IP40 IP40 IP65 IP40 Dry air, N2, Ar, CO2 Dry air, N2 Air, N2 Air, N2 Dry air, N2 Dry air, N2 Setting Digital Digital Digital
150 Same surface 110 + 30 (n2) (n = 2, 4, 6, 8) 150 + 30 (n2) (n = 2, 4, 6, 8) 35 + 30 (n2) Different surfaces D-A44 110 + 50 (n2) (n = 2, 4, 6, 8) 150 + 50 (n2) (n = 2, 4, 6, 8) 55 + 55 (n2) Same surface 15 1 pc. 110 150 2 pcs.
18.3 10.5 10 10 M5 x 0.8 M6 x 1 88 20 6 20 21 5 26 16 67 5 16 16 25 6 4.5, 8 depth of counterbore 5 29.5 Base mounting/C85RAF Y Without magnet, Built-in magnet (Band mounting type) 20/25 Stroke B XB WH G1 EF EE G2 2-LD D D SW C KK ND B LH K NA LX AM NA 3 N1 N2 L S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) NA Bore KK ZZ AM B C D EE G1 G2 H K L LD LH LX N1 N2 ND h8 S SW WH XB 0
, 6, 8 ) 150 + 100(n2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 35 + 30(n2) Different surfaces n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n =
C85RBF Y Without magnet, Built-in magnet (Band mounting type) 20/25 Stroke B SW WH G1 EE EE G2 4-FF D D KK C ND K 3 N1 N2 FX NA NA AM F S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) F FX NA Bore AM FF KK ND h8 S C D EE G1 G2 H K N1 N2 SW WH ZZ 0 0.033 0 0.033 20 20 M5 x 0.8 depth 9 M8 x 1.25 8 28 30.4 22 30 6 24 76 13 10 106 20 G 1/8 22 8 29 15 26 25 M6 x 1 depth 11 M10 x 1.25 10
L1 = M x 12.5 + 23 L2 = L1 10.5 L4 = (L1 L3)/2 + 1 15.6 30.6 3/5 2 2 2 2 2 1 4 4 4 4 4 D D D D D One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" n1: Piece of the SJ2000 n2: Piece of the SJ3000 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" The dimensions
) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4
Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set pressure
(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.
OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
) 2 (Different surfaces, same surface), 1 15 D-M9 D-M9W D-M9AL 15 + 55 (n2) 2 (n=2, 4, 6, 8) 25 + 55 (n2) 2 (n=2, 4, 6, 8) n (Same surface) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n 1 10 25 2 (Different surfaces, same surface), 1 2 (Different surfaces, same surface), 1 15 10 D-M9V D-M9WV D-M9AVL 10 + 30 (n2) 2 (n=2, 4, 6, 8) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n n 2 (Different surfaces) 2 (Same surface)
) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.