C85 18.3 10.5 10 10 M5 x 0.8 M6 x 1 88 20 6 20 21 5 26 16 67 5 16 16 25 6 4.5, 8 depth of counterbore 5 29.5 Base mounting/C85RAF Y Without magnet, Built-in magnet (Band mounting type) 20/25 Stroke B XB WH G1 EF EE G2 2-LD D D SW C KK ND B LH K NA LX AM NA 3 N1 N2 L S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) NA Bore KK ZZ AM B C D EE G1 G2 H K L LD LH LX N1 N2 ND h8 S SW WH XB 0
, 6, 8 ) 150 + 100(n2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 35 + 30(n2) Different surfaces n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n =
C85RBF Y Without magnet, Built-in magnet (Band mounting type) 20/25 Stroke B SW WH G1 EE EE G2 4-FF D D KK C ND K 3 N1 N2 FX NA NA AM F S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) F FX NA Bore AM FF KK ND h8 S C D EE G1 G2 H K N1 N2 SW WH ZZ 0 0.033 0 0.033 20 20 M5 x 0.8 depth 9 M8 x 1.25 8 28 30.4 22 30 6 24 76 13 10 106 20 G 1/8 22 8 29 15 26 25 M6 x 1 depth 11 M10 x 1.25 10
L1 = M x 12.5 + 23 L2 = L1 10.5 L4 = (L1 L3)/2 + 1 15.6 30.6 3/5 2 2 2 2 2 1 4 4 4 4 4 D D D D D One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" n1: Piece of the SJ2000 n2: Piece of the SJ3000 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" The dimensions
) 0 50 100 150 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4
Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set pressure
(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.
OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
) 2 (Different surfaces, same surface), 1 15 D-M9 D-M9W D-M9AL 15 + 55 (n2) 2 (n=2, 4, 6, 8) 25 + 55 (n2) 2 (n=2, 4, 6, 8) n (Same surface) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n 1 10 25 2 (Different surfaces, same surface), 1 2 (Different surfaces, same surface), 1 15 10 D-M9V D-M9WV D-M9AVL 10 + 30 (n2) 2 (n=2, 4, 6, 8) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n n 2 (Different surfaces) 2 (Same surface)
) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
HEP Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 Related 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 Equipment 8.4 10.6 9.3 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q2 N2 ZA1 1 1 Q2 N2 ZA1 1 2 Q2 N2 ZA1 1 4 Q2 N2 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7
= 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.
4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)
= Input block stations (Station n2) Light/Surge voltage suppressor L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 60 45.5 10 11.8 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations (n2) 0 1 2 3 4 5 6 7 8 185.5 210.5 223 248
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
Control of metal wire tension Accumulated indication shows the operating flow rate or residual amount (of N2 etc.) in a gas cylinder. Flow control of N2 gas to prevent lead frame oxidation. N2 blow prevents distortion of camera image due to air turbulence.
EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.
/J79W/F7WV D-F7BA/F7BAV D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAV D-A79W 10 15 10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)
) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.