Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

VQ5000

B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1 B A 58.5 X 12 Stations 2-Rc 1/8 (External pilot port) 15.5 22 51 69 117 42 16 107.8 179 D side With connector on D side (FD) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) Dimensions L n 12 568 588 L1 L2 11 527 547 10 486 506 9 445 465 8 404 424 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 1

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

Table of Contents

m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

VEX1

(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

G: 300 H: 600 P=17 L2 4.5 L1 VK Manual override 12.5 (Pitch) Depress and turn to operate and lock override.

A

CG-T020 CG-T025 CG-T032 CG-T040 CG-T050 CG-T063 N/A N/A Clevis CG-D020 CG-D025 CG-D032 CG-D040 CG-D050 CG-D063 CG-D080 CG-D100 Single rod clevis I-G02 I-G03 I-G03 I-G04 I-G05 I-G05 I-G08 I-G10 Double rod clevis Y-G02 Y-G03 Y-G03 Y-G04 Y-G05 Y-G05 Y-G08 Y-G10 Rod clevis pin IY-G02 IY-G03 IY-G03 IY-G04 IY-G05 IY-G05 IY-G08 IY-G10 Rear clevis pin CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 IY-G08

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

VCW

D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 T : Thread type 2 5.5 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 (44) W T R Z (Y) L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Digital Flow Switch (Integrated display type)

type "L2" only 1030 0x0406 0 R/W Selection of external input U8 0 Y 0: oUt (Switch output) 1: in (Exterior input) 0: Air (Air) 1: Ar (Argon) 2: Co2 (Carbon dioxide) 1060 0x0424 0 R/W Fluid U8 0 Y 0: std (Standard condition) 1070 0x042E 0 R/W Normal condition U8 0 Y 1: nor (Normal condition) 0: HYS (Hysteresis) 1: Wind (Window comparator) 2: AC Output operation mode U8 0 Y (Accumulated output

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) (44) W T R (Y) Z T 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93

Manifold Specifications

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type