3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

1/4, 1/8 port (A port) 25 12 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector

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(mm) Model Flow characteristics NBR, FKM 1 cm3/min or less Port size Weight (g) External Leakage C[dm3/(sbar)] b Cv Seal material Leakage 2 3 4.5 2 0.59 1.2 2.3 0.59 1.2 0.48 0.45 0.46 0.48 0.18 0.33 0.61 0.18 VXE2110-01 VXE2120-01 VXE2130-01 VXE2110-02 VXE2120-02 VXE2220-02 VXE2320-02 VXE2130-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220

reduces flow setting time

In addition, the universal type is only available with 180 setting. 588 A Speed Controller with Indicator AS-FS Series Needle Valve/Flow Rate Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 AS-F AS-F Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Orifice symbol (diameter) Solenoid valve (Port size) DC 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6mm) VX21 VX22 VX23 Model Class H 01 ( ) 02 ( ) 1 8 Rated voltage S L Z 1 4 02 ( ) 03 ( ) 02 ( ) 03 ( ) Port no.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

In addition, the universal type is only available with 180 setting. 688 A Speed Controller with Indicator Stainless Steel Type AS-FSG Series Needle Valve/Flow Rate Characteristics AS201FSG-01, AS211FSG-01 AS201FSG-02, AS211FSG-02 AS101FSG-M5, AS111FSG-M5 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 AS-F Flow rate [L/min (ANR)] Flow rate [L/min (ANR

Refrigerated Thermo-chiller

HRZ001-L-Z HRZ001-L1-Z HRZ002-L-Z HRZ002-L1-Z HRZ004-L-Z HRZ004-L1-Z HRZ004-H-Z HRZ004-H1-Z HRZ008-H-Z HRZ008-H1-Z HRZ001-L2-Z HRZ002-L2-Z HRZ004-L2-Z HRZ008-L2-Z HRZ002-W-Z HRZ002-W1-Z HRZ008-W-Z HRZ008-W1-Z HRZ010-WS-Z HRZ010-W1S-Z HRZ010-W2S-Z HRZ001-H-Z HRZ001-H1-Z HRZ002-H-Z HRZ002-H1-Z HRZ008-L-Z HRZ008-L1-Z Applicable model Circulating fluid recoverable volume Note 1) L 15 16 17 Purge

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number

VQ7-6/7-8

Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202 3/4 L2 666 610 554 498 442 386 330 274 162 218 ( ): 3/4 Dimensions inside are for rubber seals. 3-10-28 29 ISO Standard

VQ7-6/7-8

(Single) 175.5 (Double) 180.5 175.5 (3 position) 94 139 14 12 P PB PA 80.5 R2 R1 67 (Pilot pressure EXH port) 4-1/8 40(41.5) 38(27) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304

5 Port Solenoid Valve, Series VQC

30 25 13.5 C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250

VS 8-2/VS 8-4

16 stations) Dimension (mm) 7 L n 9 328 447 112 231 1 166 285 301 420 8 274 393 10 355 474 11 382 501 12 409 528 13 436 555 14 463 582 15 490 609 16 517 636 6 5 4 3 2 247 366 220 339 193 312 139 258 L1 L2 In case of 1 piece in the input block.

HRX-OM-I051

HRX-OM-I051 1stEditionJanuary.2005 Rev.May.2018 Operation Manual Original Instructions Thermo-Chiller HRZ001-L HRZ002-L HRZ004-L HRZ008-L HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-L2 HRZ002-L2 HRZ004-L2 HRZ008-L2 HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S Save This Manual Carefully

LEC-OM02904

1 ( 2 ) 2 V V L 2 M W W L 3 CHARGE TR ( 3 ) B1 RA L 11 B DC24V L 21 B2 CN2 LEC-MR-J3BAT MR-J3BAT USB D/A CN4 I/F ( ) CN1A CN1 B CN5 CN 3 ( 2 ) I/O USB 1.LECSS-S5 2.

5 Port Air Operated Valve

3/8 [1 (P), 3/5 (R) port] 4 x 7 (For mounting) 1/8 (Pilot port: Upward) 30 (Pitch) P=33 VPA4 Breathing hole SYJA (Station n) (Station 1) 1/8 [Pilot port: Lateral (-P)] VZA VTA 76 53.5 29.5 VGA VPA Dimensions n: Stations 2 3 n L 10 9 8 7 6 5 4 357 VPA3 L1 L2 93 126 159 192 225 258 291 324 80 113 146 179 212 245 278 311 344 Type 21: VV5FA5-21-1-: Common exhaust L2 L1 17.5 20 15 3 P R R 66

AC Servo Motor Driver

OUTLINE DRAWINGS (2) LECSB-S8 [Unit: mm] 6 mounting hole 5 Approx.80 6 170 156 6 6 CN5 CN6 CN3 CN1 CN2 CN2L CN4 CNP1 L1 (Note) (Note) L1 L2 L3 N P1 P2 P C D L 1 1 L 2 1 U V W L2 L3 N P1 CNP2 P2 161 168 P C D L11 L21 CNP3 U V W CHARGE 6 Approx. 25.5 Approx.68 Approx.14 With MR-J3BAT With LEC-MR-J3BAT Note.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

wire length) L1 L2 4.5 (Station n) (Station 1) (Light/surge voltage suppressor) (Station n) (Station 1) 54.1 [61.1] + + + + 38.7 25.5 A A 19.2 9.4 21 (Pitch) P=17 21 1/8 (A port) 19.2 9.4 A A 18.5 (Pitch) P=16 21 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 49 49 49 49 P R P R P R P R 57.2 [59.4] 67 [69.2] 52.2 58.7 66.1 76.1 Max. 10 77 Pg7

VCA

Dimensions (mm) Side ported: L1 = n x 34.5 + 4.5 L2 = n x 34.5 + 14.5 Front ported: L1 = n x 34.5 + 44.5 L2 = n x 34.5 + 54.5 L n 9 2 4 5 10 3 6 8 7 IN port direction 315 325 355 365 142.5 152.5 182.5 192.5 177 187 217 227 73.5 83.5 113.5 123.5 L1 349.5 359.5 389.5 399.5 108 118 148 158 211.5 221.5 251.5 261.5 280.5 290.5 320.5 330.5 246 256 286 296 Side ported L2 L1 Front ported L2 17-2-