CJ2

M4 X 0.7 NTJ-010A M5 X 0.8 NTJ-015A Refer to p.1.3-12 for details of the mounting nut.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

] + 35.6 28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14

Free Mount Cylinder

through Bleed port M5 x 0.8 (32: Rc 1/8) Rod End Nut/Accessory Width across flats L Material: Carbon steel 2-P through Part no.

MXQ

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

ZP

ZL D G: M4 x 0.7 G: M5 x 0.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 ZY A B Y Model C D E K A B K L Y Model C L F F F D ZPY20B ZPY25B ZPY06B ZPY08B 25 28 18.9 37 14 10.5 10.5 20 25 22 27 23.5 24 33.5 34 51.5 52 12.4 15.6 6 8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

4 2 22 10 SMC SMC B A 3 1 5 Cover diameter 1.6 Cross section 0.34mm2 Manual override 42 36 3 M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) 46.5 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R

24

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N P P P p p IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P P P P p p 2-wire 12 V M9BV M9B P P P p p Solid state auto switch 3-wire (NPN) 5 V,12 V M9NWV M9NW P

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

M5: M5 thread 4 2-C6 3(R) EXH port 80 (L plug connector) 86 (M plug connector) 92 (L plug connector) FG R2 R1 SG S2 S1 0V 24V SMC ERR RUN TRD R R 49.3 23.2 5.5 35 ADDRESS 8 4632 D F 6 20.2 SA MODEL 4 2 12.2 P P 3 2-C6 1(P) SUP port DIN rail clamp screw L3 L4 57 (M plug connector) Indicator light 51 (L plug connector) Applicable connector: Flat ribbon cable connector (26P) (Conforming to

KR

3.18, 2.18 x M5 6, 4 x M5 MS-5ATHU-3 MS-5H-6 3.18, 2 x M5 P . 27 Hose elbow 4, 2.5 x M5 4, 2.5 x M5 For soft nylon and polyurethane tube MS-5ATHU-4 MS-5HLH-4 For nylon, soft nylon, and polyurethane tube Body rotates at 360 around the stud axis 6, 4 x M5 6, 4 x M5 MS-5ATHU-6 MS-5HLH-6 P . 28 P . 27 Gasket Gasket (H) MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 only To seal M5 thread Material

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For monifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

(L) : SYJ3240L -M5 M type plug connector (M) : SYJ3240M -M5 37 37 23.2 (Mounting holes) 23.2 (Mounting holes) 22 2.5 22 2.5 B A B A 11 11 17.5 17.5 A B A B 14 14 (Lead wire length) 71.4 About 300 98.6 79.4 [82] 52.6 [59.1] About 300 (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 28 5-M5 0.8 (Piping port) 28 [ ]

Hydraulic

C X L + Stroke 47 32 to 100 2-P (port size) Approx.

0.55

Grommet (A) 2 1/8 1/4 4.2 1 (P) 3 (R) L-type plug connector Non-locking push type VP500 N.O. (A) 2 Base mounted Body ported 1/4 3/8 1 (P) 3 (R) P. 1 8.9 M-type plug connector External pilot N.C./N.O.

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

ZP

P ZM ZH Hexagon width across flats 7 ZU ZL D H: M4 x 0.7 H: M5 x 0.8 D H: M5 x 0.8 H: M6 x 1 H: M8 x 1.25 ZY Model A B C D E F K L Y G G G Model A B C Y L K ZPR06B 6 8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZPR20B 20 25 22 23.5 38.5 49.3 67.1 12.4 27 24 39 49.8 67.6 5 6 8 15.6 28 25 10.5 10.5 ZPR25B ZQ ZPR08B 32 34 29 44 54.8 72.6 18.9 37 14 ZPR32B Applicable Tubing Applicable Tubing ZF Applicable

Electric Actuator

Max. tightening torque (lbfft) M4 x 0.7 M5 x 0.8 M5 x 0.8 Length: L (mm) 1.1 2.2 2.2 Model Bolt LEYG16M L LEYG25M L LEYG32M L 32 40.5 50.5 L Body fixed/Bottom mounting Max. tightening torque (lbfft) M5 x 0.8 M6 x 1.0 M6 x 1.0 Max. screw-in depth (mm) 2.2 3.8 3.8 Model Bolt Workpiece fixed/Rod end female thread LEYG16M L LEYG25M L LEYG32M L 10 12 12 Max. tightening torque (lbfft

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector