CLQ

A A1 E1 L1 Part no.

Series KC Self-seal Fittings

A1 M A2 D L Part No.

2-Color Display

For vacuum/ compound pressure ZSE30A 01 N M Option 3 Operating manual Booklet Symbol Calibration certificate Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa Nil Y K T Piping Option 2 01 R1/8 (M5 female threaded) None Nil Bracket A N01 NPT1/8 (M5 female threaded) Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B Dd9 H L C D d Part no.

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B H Dd9 L C D d Part no.

ZSE30A(F)/ISE30A

R1/8 (M5 female threaded) Option 2 ISG Nil None Bracket A N01 NPT1/8 (M5 female threaded) ZSM1 Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting 1/4 inch A2 Elbow type C4L One-touch fitting 4 mm, 5/32 inch Bracket C C6L One-touch fitting 6 mm A3 N7L One-touch fitting 1/4 inch Panel mount adapter Unit specifications Option 1 With

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 12 + 0.2 0 0.1 0.3 NX A1 U1 L1 7 12 Material: Stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Part no.

CRQ2

P-77 (YG)

CM2

pin part number Snap ring Cotter pin Applicable bore size (mm) 20 NZ R1 A A1 E1 L L1 ND MM NX U1 Part no.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

CM2

Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.

CRJ

and steel piping P = Operating pressure [MPa] l = Length of piping [mm] Internal cross section a (mm2) Nominal size O.D.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

and steel piping P = Operating pressure [MPa] l = Length of piping [mm] Internal cross section a (mm2) Nominal size O.D.

HRX-OM-Z002

min CH125/35(0.5MPa)CH22/2(0.5MPa) Maximum flow rate 50/60Hz(note12) L/min 55/65 Pump capacity Maximum pump head m 50 Settable pressure range(-P) MPa 0.1 to 0.5 Minimum operarating flow 50/60Hz6) L/min CH125/35(-P : 15)CH21/1 Tank capacity(Total of ch1 and 2) L Approx. 18 Fluid outletFluid return port size CH1Rc1CH2Rc1/2 Drain port size Rc1/4 Stainless steel, Copper(Heat exchanger brazing

3

Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

Vacuum Gripper

[m/s2] Note3) 150 / 30 Air supply port(P) One touch fitting (6) Internal Power supply voltage [V] 24 VDC 10% Max. vacuum pressure [kPa] note4) -84 Suction flow rate [L/min(ANR)] note4) 17 Vacuum ejector Air consumption [L/min(ANR)] note4) 57 Supply pressure range [MPa] 0.3 to 0.55 Standard supply pressure [MPa] note5) 0.5 Valve Model V114 Model ZSE20---M5-A1 Rated pressure range [kPa] 0

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.