Fieldbus system EtherCAT compatible SI Unit

(When L/A port1 LED is OFF.) LINK has not yet been established. L/A port1 or L/A port2 LEDs are OFF. (2) Check that the connectors of L/A port1 and L/A port2 communication cables are connected and there are no broken wires. (3) Keep noise sources away from the communication 9 cable.

JXCx-OMX0009

Are both the L RUN (green) and L ERR (red) LED ON? CPU ALM L RUN or L ERR is on/ flashing 2 Take appropriate measures by referring to and following the controller operation manual. 8. LED display 17.Alarm Detection for CC-Link Communication CC-Link communication error What are the states of the L RUN (green) and L ERR (red) LED?

CG5-S

t l m L (mm) Part no.

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

manifold mounting) 1/8 (A, B port) One-touch fitting (A, B port) (4.9) 2-3.2 (For mounting) (Light/surge voltage suppressor) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" 35 36 + 28 25 16.1 31.5 [38.5] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (W0): SYJ7220-W0-01

3 Port Air Operated Valve Series SYJA300

plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer to page 4-4-61 for dimensions with connector cable.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

Air Fittings & Tubing

L M Nylon Urethane M5 X 0.8 Tube O.D.

Modular Design with Uniform Body Style

min (ANR) 450 L/min (ANR) 1100 L/min (ANR) [AFD] 120 L/min (ANR) 240 L/min (ANR) 600 L/min (ANR) Nominal filtration rating*2 [AFM] 0.3 m (99.9% filtered particle size) [AFD] 0.01 m (99.9% filtered particle size) Outlet side oil mist concentration*3, *4 [AFM] Max. 1.0 mg/m3 ( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Stainless Steel 316 Fittings

31.7 35 40.5 M L Q A D N M O L Q Note 1) D is maximum diameter.

SQ1000/2000

L RUN SERIAL UNIT L ERR.

KQ2

(inch) Mass (g) Applicable tubing D1 L M Model KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 5 32 1 4 5 16 3 8 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 20.5 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Mass (g) D L A Model Note) KQ2P-01 KQ2P-03 KQ2P-05 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KQP-01 KQP-03 KQP-05 KQP-07 KQP-09 KQP-11 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 1 1 1 2 3.5 5

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

I J K L M N O P Misc.

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Base Mounted Metal Seal/Rubber Seal Series VQ

Note) 2-4-197 VQ0/1000 Kit (Terminal block) T VQ0 (Lead wire length) L4 L3 5.2 ~ =300 131 (M plug connector) <141> 108 (L plug connector) <118.5> 118 (L plug connector) <128> 121 (M plug connector) <131> 5.5 69.5 (L plug connector) <75> 76 (M plug connector) <81> 26 5.5 35 61.5 42 66 DIN rail clamp screw 23.3 P = 10.7 58 (M plug connector) L1 4.5 12 30 L2 64 (L plug connector) n 8 7 6 5 4

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type