Air Cylinder

CJ1 CJP CJ2 CJ2 Mounting nut Y Piping port M5 x 0.8 GB 12 0 0.3 MM NN Rod end nut Section Y detail JCM 14 B 0 0.3 C D CM2 B 0 0.3 CM3 12 0 0.3 Z + Stroke S + Stroke H A F NB NA CG1 CG3 8 0 0.3 Piping port M5 x 0.8 9 JMB NC 8 0 0.3 MB ZA + Stroke SA + Stroke MB1 Head cover port location Axial location (R) CA2 CS1 Head cover port location Stroke CJ2B 10 16 Z S CS2 NDh8 Y Piping port M5 x

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

5-Port Solenoid Valve

2 Thread type Non-polar U V S Positive common Z V NS Negative common NZ V r Pilot type Nil Rc F G N NPT T NPTF Terminal Block Nil Internal pilot R External pilot V Lead Wire * Only Nil is available for M5. Circular Connector * Select R, U, S, or Z for the valve when the SI unit output polarity is positive common.

V100

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

Compact Cylinder

(Single acting/Spring extend) Bore size (mm) Retaining ring Bushing Return spring Bronze element Retaining ring Plug with fixed orifice Steel ball 5 6 7 8 9 10 11 12 13 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B12-T-PS Zinc chromated Port size Rc1/8, 1/4 CQ2B16-S-PS CQ2B16-T-PS CQ2B20-S-PS CQ2B20-T-PS Port size M5 x 0.8 Nickel plated Nickel plated CQ2B25-S-PS CQ2B25-T-PS CQ2B32-S-PS CQ2B32-T-PS

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

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x 0.8 OXY: M6 x 1.0 Vacuum supply port 2-3.3 mounting hole Vacuum pad connecting port OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 13-2-16 16 Vacuum Module: Ejector System Series ZX Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1S B Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Air 20 kPa

NCQ2/CQ2

(mm) Mounting and Auto Switches Made to Order CQ2 CQ2 NCQ2 NCQ2 NCQ2 CQ2 Stroke range (mm) 12 Bore size (mm) A H Q N M J I C F K1 K2 Th9 B D G H L P P S U V Z C E inch 0 0.043 44.4 5 to 30 M3 x 0.5 22 3.5 5 #8-32UNC M5 x 0.8 6 5.4 32 5.2 3.5 37.4 10.5 M5 x 0.8 15.5 35.5 19.5 25 6 1.5 15 0 0.052 48 16 5 to 30 M4 x 0.7 3.5 28 #8-32UNC 5.4 6 M5 x 0.8 8 38 6 3.5 M5 x 0.8 15 41.5 22.5 29

15

NZ M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NX M5 x 0.8 9 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5

CJ2

nut M5 x 0.8 DPiping port 2-M5 x 0.8 -X 20Rod End Nut S + Stroke Z + Stroke Data Material: Iron Part no.

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

CRBU

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

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Fixed 4% F .S.

Mechanically Jointed Rodless Cylinder Series MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical data 1071 Series MY1W Dimensions: 16, 20 L (LL) 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

SYJ300/500/700

X port Note) M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Effective area (mm2) Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(s bar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(s bar)] b Cv Body ported for internal pilot M3 x 0.5 0.9 Type SS3YJ3-20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M3 x 0.5 M5 x 0.8 1.5 0.17 0.36 0.3 0.17 Type SS3YJ3-42-M5 Base mounted

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Single solenoid coil is located on the same side of A and B ports. 02 2 stations R port M5 x 0.8 R port M5 x 0.8 Nil A, B port M3 x 0.5 P port P port : : A, B port M3 x 0.5 S 20 20 stations M5 x 0.8 M5 x 0.8 Type 32 (4 port / Base mounted) How to Order 10--SS5YJ3-32-05 -M5 Type 32 Type S32 ( ) Single solenoid coil is located on the same side of A and B ports.