XL

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

High Vacuum Angle Valve, XL Series

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

7.5

(Regulator block mounting example) 10 Max. 19.3 (With manual operation) P port 0.5 MPa applied 0.5 MPa Regulator block Set to 0.2 MPa 0.2 MPa 5 3/ 2 2 2 2 28 21 40 4(A) 2(B) 4(A) 2(B) 1(P) 4(A) 2(B) 4(A) 2(B) 3/5(E) 1 4 4 4 4 (Pilot passage) U side (SJ3260) D side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With

V

2 stations to 20 20 stations T H R E A D T Y P E PT 00T NPTF Stations (n) 2 3 4 5 6 7 8 9 10 L1 53 69 85 101 117 133 149 165 181 L2 40 56 72 88 104 120 136 152 168 L3 16 32 48 64 80 96 112 128 144 L4 8 24 40 56 72 88 104 120 136 H O W T O O R D E R M A N I F O L D T Y P E 40 S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 S I D E P O R T E D (N)VV3Z3 40 1 N U M B E R O

5 Port Solenoid Valve Series SV1000/2000/3000/4000

U D B C3, N1 C4, N3 C6, N7 (S, R, RS)(-D) P PG PH 1 2 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Bore size 32 to 125 M9BW MHS3 D 50 3 fingers Number of fingers 3 Bore size Action Number of auto switch D Double acting 2 pcs. 1 pc. n pcs. Nil S n 32 40 50 63 80 100 125 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm Made to Order Refer to page 553 for details.

21

D-G5l type: On the head side and the rod side of the bore size 32 D-B5l/B64 types (except B59W) On the head side of the bore size 20, 32, On the rod side of the bore size 32 Auto Switch Mounting Height (mm) Auto switch model D-B54 D-B64 D-B59W D-G5NTL D-H7C D-M9l D-M9lW D-A9l D-A3lA D-G39A Note) D-K39A Note) D-C73C D-C80C D-A44A D-H7BAL D-H7NF Hs Hs Hs Hs Hs Hs Bore size 20 25 32 40 22

1

Auto Switch Mounting Position Auto Switch Mounting Height D-A7H/J79W D-A80H/F7BAL D-F7/F7F D-F79/F7NTL D-F7W D-A72/A7H/A80H D-A73C/A80C D-F7/F7V/F7W D-F7WV/F7BAL D-J7 D-A73C D-A80C D-F7WV D-F7V D-J79C D-A7/A8 D-A79W D-A73 D-A80 D-A79W D-F7F D-F7NTL Bore size (mm) Bore size (mm) A B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 40.5 39.5 40 39 37.5 36.5

Cylinder with Lock

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches 32 40 50 63 80 100 2 (Same surface) 50 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) D-M9l D-M9lW 2 (Same surface) 40 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) D-M9lV D-M9lWV D-M9lA 2 (Same surface) 55 50 1, 2 (Different surfaces) 15 10 n 15 + 40 (n 2) 10 + 40 (n 2) D-M9lAV 2 (Same surface) 40 1,

SYJ3000/5000/7000

suppressor) 69.6 [76.6] 50.1 [57.1] + 54.2 45 34.7 31.5 21.5 6 6 17 17 43.9 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): SYJ5 40-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (WO): SYJ5 40-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 49 M8 x 1 54.6 37.1

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Modular F.R.L. Unit

Note 2) AW20K to 40K 20 30 40 D Float type auto drain (N.O.)

Cylinder with Lock

9.5 10.5 4 4 4.5 4.5 4.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 4.5 5 5.5 5 6 D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-Z7/Z80 5 6 6.5 6.5 7 8.5 7.5 9.5 9.5 10.5 D-A3/A44 D-A3C/A44C D-G5NBL 35 35 40 40 40 9 10 11 11 11 D-A5/A6 D-B5/B64 D-A59W D-B59W D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P3DW D-P4DWL 4.5 5 6 5.5 6 13 13 14 14 15 4 4 4.5 4 4.5 14 14 17 16 18 Since this is a guideline including hysteresis

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

0.4

U D B C3, N1 C4, N3 C6, N7 Stations (S, R, RS)(-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Electric Actuator/Slider Type

A 40 Lead 10: LEYG32 B 20 Lead 20: LEYG32 A 20 10 1400 0 1400 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEYG32 DV7 (Motor mounting position: In-line) Vertical Horizontal 60 80 Lead 4: LEYG32 D C Lead 4: LEYG32 D C 50 Lead 8: LEYG32 D B Regenerative resistor area 60 40 Work load [kg] Work load [kg] Lead 8: LEYG32 D B 30 40 Lead 16: LEYG32 D A 20 Lead

CNA

switch model D-A44 D-A44C D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5/A6 D-F5W D-J59W D-F5BAL D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W D-A3/A3C D-A44/A44C D-G39/ G39C D-K39/K39C D-B5/B6 Bore size (mm) Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Ht Hs Hs Ht Hs Hw Hs Hw 31 40 40 40 9.5 81 2 10.5 0 72.5 31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5

CNA

switch model D-A44 D-A44C D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5/A6 D-F5W D-J59W D-F5BAL D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W D-A3/A3C D-A44/A44C D-G39/ G39C D-K39/K39C D-B5/B6 Bore size (mm) Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Ht Hs Hs Ht Hs Hw Hs Hw 31 40 40 40 81 9.5 2 10.5 0 72.5 31 4 8.5 2 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Type 2-Port Solenoid Valve JSXM Series p. 39 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Glossary of Terms Bracket Options p. 23 How to Order p. 39 Flow Rate Characteristics, Common Specifications p. 40 Construction p. 41 Dimensions p. 42 Modular Connection Examples p. 44 Spacer / Spacer with Bracket

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture