Air Cylinder

106.5 40 13.5 36.5 61.5 86.5 111.5 136.5 D-H7l D-H7C D-H7lW D-H7BA D-H7NF D-A9l(V) 20 6.5 30 55 80 25 5.5 30.5 55.5 80.5 32 7 31 56 81 106 40 13 36 61 86 111 136 20 3 26.5 51.5 76.5 25 2 27 52 77 32 3.5 27.5 52.5 77.5 102.5 40 9.5 32.5 57.5 81.5 107.5 132.5 D-G5NT 20 1.5 25 50 75 25 0.5 25.5 50.5 75.5 32 2 26 51 76 101 40 8 31 56 81 106 131 D-C7l D-C80 D-C73C D-C80C D-B5l

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

to 63 40 to 63 40 to 63 40 to 63 40 to 63 80, 100 25, 32 Bore size 15 25 25 50 50 50 50 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F79F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F59F D-F5NTL D-G39C/K39C D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Y5/Y6/Y7/Y7V D-Y7BAL D-Y7W/Y7WV D-M5 D-M5W D-M5TL

Battery-less

External Gripping State Internal Gripping State H : Overhang L : Gripping point H : Overhang L : Gripping point L L Gripping position H Gripping position H LEHF32 LEHF40 120 100 100 80 Overhang H [mm] Overhang H [mm] 80 40% 60 40% 60 40 Pushing force 100% Pushing force 100% 70% 70% 40 20 20 0 0 20 40 60 80 100 0 0 20 40 60 80 100 120 Gripping point L [mm] Gripping point L [mm] * Pushing force

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

V100

VZ34-D-01 L plug connector (L) VZ34-L-01 VFN 300 (Lead wire length) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) : With light/surge voltage suppressor 4-6-17 18 Series VZ300 Manifold Specifications Manifold Specifications For external pilot For internal pilot 20-1 40R-2 40-2 40R-1 40-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common EXH Valve stations

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

24

switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-Y7BA B A *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW For D-P3DWA (*: Cannot be mounted on bore size 20.) 25 to 63 80, 100 Bore size A B A B A B A B A B 20 40 7 36 3 35 2 25 40.5 7 36.5 3 35.5 2 36 2.5 32 37.5 10 33.5 6 32.5 5 33 5.5 32 4.5 40 43.5 10.5 39.5 6.5 38.5 5.5 39 6 38 5 50 44.5 9.5 40.5 5.5 39.5 4.5 40 5 39 4 63 47 12 43 8

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

CG1

33 40.5 40.5 Hs 27 29.5 33 37.5 43 50 A 24 24 25 29.5 37 37 46.5 46.5 B 22.5 22.5 23.5 27 34.5 34.5 45 45 Hs 27 30 33.5 38 43.5 50.5 59 69.5 A 27 27 28 32.5 40 40 49.5 49.5 B 25.5 25.5 26.5 30 37.5 37.5 48 48 Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 20 25 32 40 50 63 80 100 (mm) D-K5 D-G5W D-G59F D-G5 D-G5N D-K59N D-H7 D-H7W D-H7C D-H7BAL A 29 29 30 34.5 42 42 D-H7F Bore (mm) B 27.5 27.5

4/5 Port Solenoid Valve

plug connector (L): SYJ7 40-L3 4 5 01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (WO): SYJ7 40-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2] Approx. 300 (Lead wire length) 91 57.5 [64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 20 20 20 87.6 37.6 122.2 [126.6] 81.1 31.1 22 22 22

Table of Contents

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Table of Contents

side L side R side R side 40(53) D side D side (2n-1/8) 2 14 82.5 59 17 34 82.5 154 (Single) 175.5 (Double) 62 154 (Single) 175.5 (Double) 94 180.5 175.5 (3 position) 4n-3/8, 1/2 180.5 175.5 (3 position) Bottom ported drawing 183.5 171.5 139 14 12 P PB PA 80.5 4-1/8 67 R2 R1 40(41.5) (Pilot pressure EXH port) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Magnetic field resistant auto switch and small auto switch available "Magnetic field resistant auto switch: D-P3DW Target model C(L)KQG32 type (-X2081/-X2082) C(L)KU32 type (-X2091/-X2092) "Solid state auto switch: D-M9D-M9D-A73/D-A79W Target model C(L)KU32 type (-X2321/-X2322 only) D-P4DW also available for C(L)KQG32 type only.

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Basic type / Direct mount type Series CY3B/CY3R

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A9 D-M9 D-M9W D-A9 D-M9 D-M9W D-M9 D-M9W D-A9 D-M9 D-M9W D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5 21.5 107.5 103.5 108.5 45.5 41.5 46.5 84.5 88.5 83.5

Air Slide Table

0 20 10 40 30 60 50 70 80 0 10 20 30 40 50 60 L3: Overhang Allowable range: 100 mm L3: Overhang Allowable range: 160 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ8B-75, 100Z 2.5 V = mm/s 2.0 Load mass m [kg] V = 50 1.5 V = 150 V = 100 1.0 0.5 0.0 0 20 40 60 80 100 120 L3: Overhang Allowable range: 300 mm Allowable overhang L [mm] MXQ12B-10, 20, 30Z MXQ12B-40, 50Z 4.5 4.5 V =

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight (g) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 (mm) Dimensions D-M9W D-M9WV 500 (1000) (3000) (5000) Mounting screw M2.5 x 4 L Indicator light Mounting screw M2.5 x 4 L Slotted set screw (flat point) Slotted set screw Indicator light 3.95 2 0.3 7.5 2.8 2.6 15.9 22.8 4.6 2.8 19.5 2.6 2.6 2.6 9.5 4 Most sensitive