High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Parallel Style Air Gripper Series MHZ

Standard Body Lead wire type In-line electrical entry type Perpendicular electrial entry type Explanatory drawing Auto switch model L L L Finger position D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL Air gripper model 11 13 3.5 6.5 4 11 13 5 7 5 3 8 6 5 3.5 5 3.5 No setting 9 11 1.5 4.5 2 9 11 3 5 3 1 6 4 3 1.5 3 1.5 13 15 5.5 8.5 3 6 4 13 15

LJ1H

Limit switch 10 20 30 None B contact specification 2 pcs.

One-touch Fittings

[mm] Model D Weight [g] X Y O N Thickness Nylon Urethane N 4 KQ2D04-00A1 8.2 7.7 10 15.8 13.3 5.7 6 3.2 8.2 6 4.1 3 2.7 6 KQ2D06-00A1 10.4 9.7 12 16.8 13.3 6.7 6 3.2 10.4 13.9 11 4.5 3.8 O M L Q D M L 3 x Applicable tubing M L D Release button dimensions X Y Plug-in Reducer: KQ2R D Effective area [mm2] Min. port size Release button dimensions L A M Applicable tubing Applicable tubing O.D.

CNA

D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n =

CNA

2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8, 110 + 50 (n 2) n = 2, 4, 6, 8, Same side CLQ 15 90 100 110 35 75 80 90 100 1 Different sides MLGP 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides

C76

D-A79W Bore B A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C

C76

D-A79W Bore B A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C

MXS

MXS6-50 VWith stroke adjuster MXS6-10AS MXS6-20AS MXS6-30AS MXS6-50AS SMXS6N, #1 SMXS6N, #2 SMXS6N, #3 SMXS6, #1(#1+#5) (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 MXS6-10 MXS6-20 MXS6-30 MXS6

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 15 90 95 D-M9AVL 95 + 30 (n2) 2 (n = 2, 4, 6, 8) 15 + 30 (n2) 2 90 + 30 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) D-A5/A6 D-A59W D-F5/J5 D-F5W D-J59W D-F5BAL D-F59F 2 pcs. (Different surfaces, Same surface), 1 pc. 125 25 135 150 25 + 55 (n2) 2 125 + 55 (n4) 2 135 + 55 (n4) 2 150 + 55 (n4) 2 n pcs.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

LEC-OM071xx

Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * *

Table of Contents

Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

SQ1000/2000

AXT661-12AL AXT661-12AL AXT661-14AL AXT661-14ANL AXT661-13ANL AXT661-13AL 300mm 300mm AXT661-14AL-6 AXT661-14ANL-6 AXT661-13ANL-6 AXT661-13AL-6 600mm 600mm AXT661-14AL-10 AXT661-14ANL-10 AXT661-13ANL-10 AXT661-13AL-10 1000mm 1000mm AXT661-14AL-20 AXT661-14ANL-20 AXT661-13ANL-20 AXT661-13AL-20 2000mm 2000mm AXT661-14AL-30 AXT661-14ANL-30 AXT661-13ANL-30 AXT661-13AL-30 3000mm 3000mm Note) When

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

D D (mm) 10 15 20 30 40 Size 14 18 20 22 30 D Note 1) Only side ports are available except basic type.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

Mini Free Mount Cylinder

For Axial Mounting With Auto Switch (Built-in Magnet) For Lateral Mounting A B 27 29 31 33 38 43 48 53 27 29 31 33 38 43 48 53 27 29 31 33 38 43 48 53 C D Cylinder model Mounting bolt size CDUJB6-4 -6 -8 -10 -15 -20 -25 -30 CDUJB8-4 -6 -8 -10 -15 -20 -25 -30 CDUJB10-4 -6 -8 -10 -15 -20 -25 -30 Cylinder model Mounting bolt size CDUJB6-4 -6 -8 -10 -15 -20 -25 -30 CDUJB8-4 -6 -8 -10 -15 -20