O D E Nil T Tamper-Resistant D Tamper-Resistant Flat Head Screw Driver Adjustment Type B O D Y S I Z E 1 M3, M5 2 18, 14 3 38 4 12 A B C D E F G Port Size Model O P T I O N D I R E C T C O N N E C T I O N T Y P E 9 28.3 25.5 10.3 9 10 8 M5x0.8 (N)AS1200-M5 Nil S Sealant 14.6 36.4 31.4 14.1 14.3 18 12 1/8 (N)AS2200-01 P O R T T H R E A D 19.5 40.8 35.8 18 18 27.2 17 1/4 (N)AS2200-02 R(PT
DC1224 V( 10) DC1224 V(10 ) 6 DC(+) DC(-) DC1224 V( 10) DC1224 V(10 ) 7 DC(+) DC(-) / / / ( ) 8 9 -30No.PS-OMH0002CN-D No. () / () / 10 2030 20 "-M" 11 ( ) "-M" SI MPa 12 13 -31No.PS-OMH0002CN-D No. / / 14 () / () 15 () ( ) () () -32No.PS-OMH0002CN-D OUT1 OUT2 80 mA 07F.S. 3 0 1 digit 0 -27-67 -33No.PS-OMH0002CN-D ISE70() ISE75() ISE75H() 01 MPa 010 MPa 015 MPa -0.11
M5 type U10/32 type Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.
0.14 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.
Bottom Straight S No bracket S IN 1 IN Made to Order Output specifications V T OUT1 OUT2 A B C D E With panel mount adapter (For with flow adjustment valve) With panel mount adapter (For without flow adjustment valve) NPN PNP NPN NPN PNP PNP NPN PNP NPN PNP Analog 1 to 5 V Analog 4 to 20 mA Analog 1 to 5 V Analog 4 to 20 mA External input Note) Panel mount adapter A ZS-33-J ZS-33-JS Panel
Piping: 5 (Body Ported), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: B (Bracket), Option: LP (Indicator Light, Manual Override)
Piping: 0 (Base Mounted), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override)
Piping: 0 (Base Mounted), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override), Thread: N (NPT)
Piping: 5 (Body Ported), Port Size: 01 (Body Ported 1/8), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: B (Bracket), Option: LP (Indicator Light, Manual Override), Thread: T (NPTF)
Piping: 5 (Body Ported), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: B (Bracket), Option: LP (Indicator Light, Manual Override), Thread: N (NPT)
Piping: 5 (Body Ported), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: B (Bracket), Option: LP (Indicator Light, Manual Override), Thread: T (NPTF)
Piping: 5 (Body Ported), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override), Thread: N (NPT)
Piping: 5 (Body Ported), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override), Thread: F (G)
Piping: 4 (Manifold Style), Port Size: 00 (w/o Sub-plate), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override), Thread: N (NPT)
Piping: 5 (Body Ported), Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override), Thread: T (NPTF)
Piping: 5 (Body Ported), Port Size: 01 (Body Ported 1/8), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: B (Bracket), Option: LP (Indicator Light, Manual Override), Thread: N (NPT)
Piping: 5 (Body Ported), Port Size: 01 (Body Ported 1/8), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override), Thread: N (NPT)
Piping: 0 (Base Mounted), Port Size: 03 (Sub-plate Rc3/8), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override), Thread: T (NPTF)
Piping: 4 (Manifold Style), Port Size: 00 (w/o Sub-plate), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Bracket: None, Option: LP (Indicator Light, Manual Override)