Blue .025 F-2815-251-NORYL Black .030 F-2815-301-NORYL Beige .035 F-2815-351-NORYL Dk. Grey .040 F-2815-401-NORYL Teal

Blue .025 F-2815-251-NORYL Black .030 F-2815-301-NORYL Beige .035 F-2815-351-NORYL Dk. Grey .040 F-2815-401-NORYL Teal

Blue .025 F-2815-251-NORYL Black .030 F-2815-301-NORYL Beige .035 F-2815-351-NORYL Dk. Grey .040 F-2815-401-NORYL Teal

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Black .016 F-2815-161 Grey .020 F-2815-201 Blue .025 F-2815-251 Brown .030 F-2815-301 Beige .040 F-2815-401 Rust

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

EXxx-OML0010CN

. & / a) (52) b) 28 c) /(16) d) e) (51) f) g) h) OFF ON i) j) (51) k) (SIDXDYDM) ON/OFF ON SI 030 (DXDYDM) 1 -17No.EX-OML0010CN-C a) (52 ) b) (28 c) /(16 ) d) e) (51 ) f) g) h) Offset binarySign & Magnitude2S Complement mA() V() Scaled mA() V() i) j) (51 ) -18No.EX-OML0010CN-C 3.

Wireless System

E 16 outputs D-sub connector (25 pins) F 16 outputs Spring type terminal block (32 pins) * For specifications, refer to the Fieldbus system EX600 series in the Web Catalog.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first