V

This can be used in a pure vacuum system, when no positive pressure supply is available.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Speed Controller with Residual Pressure Release Valve with One-touch Fitting ASFE Series RoHS Residual pressure can be easily released with one push of button. Model Elbow type Applicable tubing O.D.

VZ1000

The valve can be locked in the manual override position by turning it to the direction that the arrow shows while keeping it pressed. If it is not turned, it can be used as a non-locking push type. Caution When operating the lock with the driver, use a watchmakers screwdriver and turn lightly.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

1/8 1/4 3/8 1/2 AS2000E AS2000E/3000E/4000E AS3000E/4000E AS4000E With residual pressure release valve Thread type Nil N F Rc NPT G Caution Be sure to read before handling.

Speed Controller: Standard Type Series AS In-line Type 1

Speed may be accurately controlled even at low speeds. Constant speed easily set. Retainer prevents an accidental loss of needle.

Speed Controller: Standard Type In-line Type AS Series

Speed may be accurately controlled even at low speeds. Constant speed easily set. Retainer prevents an accidental loss of needle.

Vacuum Regulator Series IRV

Information Vacuum Regulator Series IRV Vacuum pressure can be freely adjusted 3 series sizes IRV1000: 60l/min (ANR) IRV2000: 100l/min (ANR) IRV3000: 150l/min (ANR) Setting sensitivity: 0.13kPa or less Modular filter can be used on the SET side Application Examples Suction of work pieces Solenoid valve Vacuum pump Tank IRV Filter Suction pad Work piece With single pressure Solenoid valve

Speed Controller: Standard Type Series AS In-line Type 1

Speed may be accurately controlled even at low speeds. Constant speed easily set. Retainer prevents an accidental loss of needle.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

1/8 1/4 3/8 1/2 AS2000E AS2000E/3000E/4000E AS3000E/4000E AS4000E With residual pressure release valve Thread type Nil N F Rc NPT G Caution Be sure to read before handling.

Speed Controller: Standard Type In-line Type AS Series

Speed may be accurately controlled even at low speeds. Constant speed easily set. Retainer prevents an accidental loss of needle.

Slit Valve

Slit Valve XGT Series Cassette type Non-cassette type For 200 mm wafer Cassette type Non-cassette type Low particle generation For 300 mm wafer L motion With end lock mechanism XLA Can be held open/close of the gate when emergency stop. XL Service life of two million cycles. XLQ With SMC's life conditions.

G15/G27

It will be a cause of malfunction.

Type: 000 (Lever Type Feedback), Pressure Gauge: 3 (1.0MPa), Construction: 1 (w/Terminal Box), Accessories: BE (B+E), Connection: 1 (1/4NPT, G1/2)

Type: Lever Type Feedback, Pressure Gauge: 1.0MPa, Construction: w/Terminal Box, Accessories: B+E, Connection: 1/4NPT, G1/2

LEC-T1_C

Speed 000 Absolute SET 000 300mm/s SET 001 Relative 001 200mm/s 58 - (3-2) TB Ver.511 Step data Step No.

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder