REC

Mounting hole F N N Z CE1 S+Stroke H 40 ZZ+Stroke CE2 Standard port ML2B Relieving port ML1C (mm) 2-7 FT FX FY FZ B1 D A AL B B2 F G H E Bore size Stroke range Mounting hole REA 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25,

High Power Cylinder:

ML2B (mm) ML1C Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to1000 Eff. thread length 15.5 19.5 19.5 21 Bore (mm) 20 25 32 40 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70 72 84 FW 38 44 50 60 FY 21 27 33 36 FX 51 53 55 66 FT 6 9 9 9 FD 7 7 7 9 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 B 32 36 44 53 A 18 22 22 24 H1 5 6 6 8 H2 8 8 9 11 REA REC Bore (mm) 20 25 32 40 S

RSH/RS1H

L CZ CT CT Y V U Conveyor lower limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across corners I) (mm) Width across corners I 85 103 132 GA 16 24 24 H 128 144.5 171.5 FT 20 25 25 FX 73 90 110 FZ 93 114 138 A 221 243.5 299.5 CD 20 20 25 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 L 45 54 56 N 9 11 13 O QB 7 8.5 10 B 93

REC

CX F N N Z S + Stroke H CY In the case of 40 ZZ + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Standard port RHC (mm) MK(2) 2-7 A AL B B1 B2 D F FT FX FY FZ G H E Bore (mm) Stroke range Mounting hole 0 0.033 0 0.033 0 0.033 0 0.039 20 Up to 700 18

CLS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-FD MM BZ GB lRY EA BF FY D E W AL FT C B M A K F RT N N FX FZ BY S + Stroke H ZZ + Stroke BW With rod boot 180, 200, 250 BZ BV e BG BE f l 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm)

CNG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc P 4-FD Width across flats KA Width across flats B1 CNA GB Head side cylinder port PH MM CNS FY 0.15 E 0 0.05 BZ BC BF D I CLS H1 CLQ AL C 0.1 FX 0.15 8-J BN FT A K S + Stroke H ZZ + Stroke F FZ NA MLGP BC RLQ MLU e ML1C DZZ + l + Stroke h + l f 8 l

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

MU

Position of piston across 4 flats of double rod is not same. 7-8-11 12 Series MUW Dimensions of Each Mounting Foot style LS + Stroke (mm) Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUWL25 MUWL32 MUWL40 MUWL50 MUWL63 Flange style (mm) FZ 24 28 32 39 50 FY 66 82

CJ2X/CUX/CQSX/CQ2X/CM2X

Speed Cylinder Double Acting, Single Rod Series CM2X 20, 25, 32, 40 How to Order Mounting style Head side trunnion style Clevis integrated style Boss-cut basic style Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Rod side trunnion style Boss-cut rod side trunnion style B L F G C D U T E BZ Boss-cut rod side flange style FZ

MU

LY 56 71 89 109 129 Y 6 8 10 11 14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123 LX 11 12 15 18 22 X 12 16 18 21 24 Model MUL25 MUL32 MUL40 MUL50 MUL63 LH 29 37 46 57 67 LT 3.2 4.5 4.5 5 6 LZ 23 27 31 37 48 Axial foot MUL25SMU25, #2 (#1+#2+#11) MUL32SMU32, #2 (#1+#2+#11) MUL40SMU40, #2 (#1+#2+#11) MUL50SMU50, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ

3 Position Cylinder Series RZQ

AR + Full stroke 50 118.5 127.5 96.5 76 6.6 9 67 63 130 139 102 92 9 9 90 Bore size (mm) Head side flange style: RZQG FZ L M 4 x FD 32 65 18 34 40 72 18 40 50 90 22 50 63 108 28 60 FV M REA REB REC L B + Full stroke FT FZ FX AH + Full stroke CY CX Double clevis style: RZQD MQ Double Clevis Style (mm) CT Cap bolt RHC Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW RZQ 32 130.5 82.5 120.5

Air Cylinder Series CS1

d S + Stroke ZZ + Stroke ZZ1 + l + Stroke Long stroke 4 x J 2 x P Width across flats KA 4 x FD With rod boot S + Stroke ZZ + Stroke ZZ1 + l + Stroke With auto switch: CDS1F 4 x J ~ = 2 x P Width across flats KA 4 x FD With rod boot ~ = ~ = S + Stroke ZZ + Stroke ZZ1 + l + Stroke (mm) Without rod boot With rod boot Type Bore size (mm) Stroke range (mm) A AL B B C D E EA F FA FD FT FX FY FZ

Plate Cylinder with Lock Series MLU

66 82 102 126 ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FD Model 8 8 9 12 24 28 32 39 5.5 7 9 11 134 148 158 189.5 FT FZ FX 2-FD Rear flange FY FV FT FZ FX ZZ + Stroke Single clevis Double clevis CDH10 Q + Stroke CX CX -0.2 -0.4 +0.4 +0.2 L Z + Stroke RR -0.1 -0.3 CZ ZZ + Stroke (mm) CX CZ 17 22 27 32 Q RR 143 162 176 209.5 Z ZZ L CDH10 9 11 13 16 Rotation angle Model

Compact End Lock Cylinder Series CBQ2

(mm) L L1 A A FV M 80.5 73 7 28.5 32 90 79.5 7 28.5 40 4-FD FT L 92.5 82.5 8 33.5 50 B + Stroke A + Stroke FZ FX 94 88 8 33.5 63 Rod end male threads Dimensions other than A, L and L1 are the same as the front flange type.

3 Position Cylinder Series RZQ

AR + Full stroke 118.5 127.5 96.5 6.6 76 9 67 50 130 139 102 9 92 9 90 63 Bore size (mm) Rear flange type/RZQG FZ L M 4-FD 65 18 34 32 72 18 40 40 90 22 50 50 108 28 60 63 FV M M L B + Full stroke FT FZ AH + Full stroke Double clevis type/RZQD (mm) Double clevis CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW 112.5 82.5 10 102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28

mlu

66 82 102 126 Model FT 5.5 7 9 11 8 8 9 12 24 28 32 39 134 148 158 189.5 FZ FX 2-FD Rear flange FY FV FT FZ FX ZZ + Stroke Single clevis Double clevis CDH10 Q + Stroke CX CX -0.2 -0.4 +0.4 +0.2 L Z + Stroke RR -0.1 -0.3 CZ ZZ + Stroke (mm) CX CZ 17 22 27 32 L Q RR 143 162 176 209.5 Z ZZ CDH10 9 11 13 16 Rotation angle Model MLUC25, MLUD25 MLUC32, MLUD32 MLUC40, MLUD40 MLUC50, MLUD50 +0.058

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEJ LL LEL LEM FV M M FV LEY Included parts Flange Body mounting bolt FZ FX 4 x FD FT FT FZ FX 4 x FD LES LEPY LEPS Rod/Head Flange [mm] Size FD FT FV FX FZ LL M LER 25 5.5 8 48 56 65 6.5 34 32 5.5 8 54 62 72 10.5 40 63 9 9 80 92 108 28.4 60 LEH LEY -X5 Material: Carbon steel (Nickel plating) * The LL measurement is when the unit is in the Z-phase first detecting position.

Electric Actuator/Slider Type

LL FV M M FV Included parts Flange Body mounting bolt FZ FX 4 x FD FT FT FZ FX 4 x FD Rod/Head Flange [mm] Size FD FT FV FX FZ LL M 25 5.5 8 48 56 65 6.5 34 32 5.5 8 54 62 72 10.5 40 63 9 9 80 92 108 28.4 60 Material: Carbon steel (Nickel plated) The LL measurement is when the unit is in the Z-phase rst detecting position.

15

LEL LL LEM M FV FV M LEY LES Included parts Flange Body mounting bolt FZ FX FZ FX 4 x FD 4 x FD FT FT LEPY LEPS Rod/Head Flange LER [mm] Size FD FT FV FX FZ LL M LEH 25 5.5 8 48 56 65 4.5 34 32 5.5 8 54 62 72 8.5 40 63 9 9 80 92 108 24.4 60 LEY -X5 11LEFS Material: Carbon steel (Nickel plating) * The LL measurement is when the unit is at the retracted stroke end position. 11LEJS 25AA B

Integrated Controller

FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.