Aluminum High Vacuum Angle Valve V I G L H A V V M A C U U Flange side r Temperature specifications/Heater t Auto switch type Symbol Nil Auto switch model Without auto switch (without built-in magnet) Remarks Symbol Nil Temperature 5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4
Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24
TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 104 Made to Order Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket X417 1 1 1 1 2 1 1 Nil W Z L H LZ HZ Nil W L H L, H, LS, HS X416 on one side X416 on both sides (one on each side) X416 on one side, X417 on the other side X416 on L unit side X416 on H unit side X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side
TF H TT TV 4TF TF+0.10 0 TV TX 20 25 32 40 38 8 29 14 11 10 5.5 25 3.2 (35.8) Up to 125 Z + Stroke TZ 45.5 10 33 16 13 10 5.5 30 3.2 (39.8) Up to 200 ZZ + Stroke 54 12 40 20 15 10 6.6 35 4.5 (49.4) Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) Up to 200 Clevis style: CG1DN Z 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TW TX TY TZ Z ZZ Z ZZ Z ZZ ZZ CD hole H10 Axis
H H Center of piping Center of piping Center of piping Dimensions Model Standard specifications Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B*1 C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28
RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG)
+ l Z + l + Stroke ZZ + l + Stroke S + Stroke Z + Stroke ZZ + Stroke 125 to 160 A Rc BP lock-up port Unlocked when pressurized With rod boot B Rc BP lock-up port 2-Rc P CD hole H10 Axis d9 Width across flats KA EA D Plug cap 2 positions l S + Stroke Z + Stroke ZZ + Stroke h + l Z + l + Stroke ZZ + l + Stroke Stroke range (mm) Bore size (mm) A AL B B1 BX BY C BP CX CD CT D EA F FA GA GB
X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket X417 1 1 1 1 2 1 1 Nil W Z L H LZ HZ Nil W L H L, H, LS, HS X416 on one side X416 on both sides (one on each side) X416 on one side, X417 on the other side X416 on L unit side X416 on H unit side X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side
J D K E L H M N O Note) Dimensions of model with rubber bumper are same as standard as shown above.
250-S (Refer to page 44 for both ends tapped and male thread dimensions.) 150 (1-1/2"), 200 (2"), 250 (2-1/2") P-port H-thread C-depth 4 places N-through hole Z Q J M2 bolt circle W M1 E I dia.
Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.
HB NT RS H A PS PP N A RZQ Z + Stroke W Square nut for body mounting J MI W S TW CEP1 CE1 CE2 ML2B C J G5-S (mm) Model A EA EB H HA HB HC HG HP HT J LL LW M MM N CV REAHT25 REAHT32 125 28.5 79 63 46 46 61.5 19.5 58.5 35 M6 x 1.0 56 119 M6 x 1.0 10 20.5 132.5 30 90 75 52.5 57.5 72.5 25 69.5 43 M8 x 1.25 63.5 130 M8 x 1.25 12 23 MVGQ CC Model NL NT PA PB PP PS S TW W XB Z REAHT25 REAHT32 18
B FB EB H 4-counterbore depth C 4-J depth JK HI S + Stroke HO TT T HP HG MM thread depth M PA H 2-P Hollow shaft for piping HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A N N (mm) HP HO HI HG HB HA H GP G FB FA EB EA d D C B Model A REAL15 REAL20 REAL25 REAL32 REAL40 39 38 14 16 4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5
Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5
Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override
Applicable bore size (mm) 12 16 20 25 32, 40 50, 63 80 100 Dd9 d H B C Part no.
x 0.8 MM D D FY FB H + Stroke Z + 2 x Stroke S + Stroke NA F NA FT F A H FZ FX A 2 x FC Mounting hole C B 0 0.3 B 0 0.3 Drawing of view E (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 Specific
Shaft type S W Single shaft Double shaft Single shaft with four chamfers Double shaft key Double shaft with four chamfers Rotating angle Standard 90 180 100 190 90 180 100 190 Standard X Y Option Option Z Type Size Nil H Pneumatic Air-hydro 50 63 80 100 Foot Bracket Part No.