MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

MXW Series Long Stroke Slide Table

: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through hole 4.2 0 F E 5H9 +0.03depth 4.5 0 G F E Model J H GG Z N L K 82.5 123 91 MXW12-100 114 35

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

4 x M2.5 x 0.45 thread depth 2.5 12.5 K Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

7 12 3.2 B A 11 5.5 5.5 11 H (NN 1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50

LEC-OM02904

( ) (1) (B1B2) B1 B1 DC24V DC24V U B DC24V U B DC24V VAR VAR B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 13.1.2 13 2 13.

KJ

H (Width across flats) Connection thread Rc T Model N Applicable tubing O.D.

Profi-E

Communication connector Power supply connector (Plug) BF LED RUN LED Switch cover DIA LED Connect i on t o ext ernal equi pm ent Pow er suppl y w i ri ng di agram Com m uni cat i on w i ri ng 1: N C di agram 1: +24V 2: RXD /TXD _N A Pow er Suppl y M ast er PLC 2: N C 3: N C D C24V B 3: G N D 4: RXD /TXD _P 4: N C 5: N C 5 Sel ect a D C pow er suppl y w i t h adequat e capaci t y w i

Series VQ Metal Seal/Rubber Seal Body Ported

The direction of the L and M connectors of a pilot valve is opposite to that of the single and double style. (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) X18 {A side( Bottom side)} {B side(Top side)} X18 {A side( Bottom side)} {B side(Top side)} 3 position (VQ1000 only) 3 position (VQ1000 only) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5W, (Y): 0.5W, G type: DC only Note 1) (H

Title not found

1 r|{t -h rffi Slandard With type air cushion MGP MGP F a s y a d r u s h e n L c l H * p e E a i o I recti I Piping is possible from two di ons High ' 1 2 " ' 1 6 20 40 * I I Auto switches can be mounted on two sides T;;...*. Clea. room series: . water resisbnttype: o20to o100 -!

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Rc NPTF G NPT A H D N CF SF CF SF Suffix Brass B Stainless steel Brass Nil Z H FKM AC only Oil-free specification Stainless steel All IN ports are Rc 3/8.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

: 10-SYJ34MG H -M5 Directional Control Valves Air Grippers Modular F.

7

VXZ Height Weight Class H/24 VDC Class H/DIN terminal Seal material: EPDM 7%Smaller 20%Lighter VXS (90 g) (7 mm) Approx.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 10 to 16 1.0 N 3.0 N Note) Pads are exclusively ball joint type and are not interchangeable with other pads. 20 to 50 2.0 N 5.0 N Pad Type Ball joint type Pad form 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

RHC

H B B Material: Carbon steel Material: Carbon steel B Part no.

LEC-OM07605CN

4 10 4. 4.3.3 (1) ON ON (SSCNET/H ) (SSCNET/H) ON (SSCNET/H ) (SSCNET/H) () () : 1 [AL. 50 1] () :1 [AL.50 1] () Ready off OFF 0.8 s Ready on 0.8s 0.8 s () 0.8s () Ready on Off on :1 [AL.E1 1] : 1 [AL.

15

(Table clearance is included.) 832 Motorless Type Electric Actuator/High Rigidity Slider Type Ball Screw Drive LEJS Series LEJS40, 63 How to Order q H NZ 40 500 e r t A w LEJS q Accuracy e Motor type w Size t Stroke [mm] r Lead [mm] 200 to 1500 Nil Basic type H High precision type 40 63 Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting