A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

•

rod boot Boi.~ :S, rz.e W " K !

5 Port Solenoid Valve

250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

CNA

F N F h + l V W K A M BN ZZ + l + 2 stroke lC K A lB With rod boot at both ends S + Stroke H + Stroke H ZZ + 2 l + 2 stroke ZZ + stroke (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA A 30 35 35 40 40 to 500 to 600 to 600 to 750 to 750 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4

CNA

V TY D e D E H1 AL AL A A F BN TT K K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37

CNA

F AL A F Q GB K With rod boot LH W W D D e E LY V H1 Width across flats B1 8 f l LT KA Width across flats h + l T Y X S + Stroke BN N X Y ZZ + l + 2 stroke LX C H 4-LD With rod boot on both sides LS + Stroke ZZ + 2 strokes ZZ + 2 l + 2 stroke B Bore size (mm) Stroke range (mm) 40 50 63 80 100 LD LH LS LT A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 9 40 45 50 65 75 207 222 250

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Electric Actuator/Slider Type

LEY LEYG LEFS/LEFB LEJS/LEJB LECSS-T How to Order T6 LEJB 40 500 T q w e r t y u i o q Size w Motor type 1 e Lead [mm] Symbol LEJB40 LEJB63 T 27 42 40 63 Symbol Type Output [W] Actuator size Compatible driver T6 AC servo motor (Absolute encoder) 100 40 LECSS2-T5 T7 200 63 LECSS2-T7 1 For motor type T6, the compatible driver part number sufx is T5. r Stroke [mm] 2 y Cable type 4, 6 u Cable

Rotary Actuator/Vane Style Series CRB1

n ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 Key 1 e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws L Screw Model CRB1BW 50 CRB1BW 63 CRB1BW 80 CRB1BW100 M 6 48 M 8 52 M 8 60 M10 80 118 Series CRB1 Rotary

F

H E A D U N I O N E L B O W: KQLE/KQ2LE 6mm Tube STEM MALE NIPPLE: KQN/KQ2N 6mm R 14 U N I O N B L A N K: KQC/KQ2C 6mm Tube H O W T O O R D E R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

JIS Standard Hydraulic Cylinder

x 0.8 K B +0.1 0 40 31.5 145 115 45 60 M24 x 1.5 40 30 M6 x 1.0 C-series A CHS +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 30 M6 x 1.0 +0.1 0 50 40 185 145 57 79 M39 x 1.5 63 40 M8 x 1.25 CH2 CH2 Double knuckle joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

Air Slide Table

Front matter 1 Air Slide Table/Reversible Type Series MXQR Fig. (1) Load Weight: W (kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Fig. (3) Workpiece Mounting Coefficient: K Pitch moment Yaw moment Roll moment Table mounting W W My Mp Mr W W W Static moment Dynamic moment L1 A1 K = 1 L3 A5 L2 A3 End plate mounting Mp Mr W My W W W L3 A6 W L1 A2

Hygienic Design Cylinder Series HY

V W V Port U U 2 x P (Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

10

R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 A B B1 C D E F Size M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 22 22 29.5 43 45 45 50 21 22.5 22.5 25 61 (67) 74.5 (82.5) 79 (87) 85.5 30 35 40 40 9.5 10.5 10.5 14 20

Metal Seal/Rubber Seal Series VQ Body Ported

1 to 6 Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only 2-4-101 Exploded View of Manifold VQ1000 (VV5Q13)/Plug-in Unit, Flip Type For how to increase the stations, refer to the instruction manual.

XM, XY

Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C XMA XYA Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right flange surface Indicator