Environment

LEF How to Order LEJ LEL S2 25A-LEJS 40 500 A H LEM Series compatible with secondary batteries w e r q t y u i o !

5

(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston

MY1

10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NH VV VV XX Z XX Z NH 27.7 10 30 160 28 56 40 40 3.5 153 7.5 48 9 11 2.5 15 14 68 13 33.7 12.5 32 200 34 60 50 40 4.5 191 11.5 45 10 14.5 5 18 12 72 14 Y 2-d R S D WX

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

1

NCA Stroke Range DSeries Bore size (mm) Standard stroke (mm) Long stroke (mm) MY1B 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 100 to 2000 2001 to 5000 (Up to 3000 for 10, 16) -X MY1M(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) MY1C(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) 20MY1H 16, 20, 25, 32, 40 50 to 600 601 to 1500 (Up to 1000

Aluminum High Vacuum Angle Valve

For details, consult your SMC sales representative. 419 B Aluminum High Vacuum Angle Valve Double Acting/Bellows Seal RoHS XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size w Flange type e Pilot port direction Rear flange surface Type KF (NW) K (DN) Applicable flange 16, 25, 40, 50, 63,

5-Port Solenoid Valve

Refer to the electrical power waveform to the left. 0.1 w 0.1 w 0.35 w 0.35 w With power saving circuit 0 V 0.4 (0.95) W With power saving circuit 0.1 (0.4) W Only products with an indicator light are equipped with the power saving circuit.

Thermo-chiller/Rack Mount Type

024 030 HRR -W HRR010-W-20 30 20 Facility water flow rate [L/min] Facility water flow rate [L/min] HRR030-W 25 15 HRR024-W 20 15 10 10 HRR018-W 5 5 HRR012-W 0 0 0 10 20 30 40 0 10 20 30 40 50 Facility water inlet temperature [C] Facility water inlet temperature [C] * This is the required facility water flow rate at the circulating fluid rated flow and the cooling capacity listed in the

CRBU

Applicable shaft type: W A parallel keyway is used on the long shaft for size 40.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

MY1

l (600) 40 Weight m 30 W Caution MY1H40 MY1H40 MY1H40 (550) l W 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Compact Rotary Actuator Series CRQ2

2 u t e o @3 @1 @4 @0 @6 @0 CRA1 CRQ2 q w r y !5 i MSQ q w r y !5 !6 i MSZ CRQ2X MSQX MRQ With cushion Size 20/30/40 With auto switch and cushion Size 20/30/40 !3 !0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Aluminum alloy Aluminum alloy Carbon tool steel No. q w Description Cylinder tube Piston Bore size (mm) 12 16 20 25 32 40 50 63 No.

2/3 Port Valve

Solenoid Specifications Power consumption W (Holding) Voltage fluctuation % Apparent power VA Inrush Holding W/o silencer W/ silencer Frequency Hz Temp. rise C (Rated voltage) Pilot exhaust noise dB Power supply Model AC 50 20 11 4.5 5 to 60 60 6 5 to 40 Air operated Rated value 10 104 83 VXF 2150 DC VXF 2160 AC 50 20 11 4.5 5 to 60 60 6 5 to 40 DC Rated value 10 105 85 VXF 2280 AC 50 40

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Air Cylinder Series CM2

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS 10 Lock bushing Copper alloy With lock at double ends 11 Lock spring Stainless steel Kit no. CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W 12 Bumper Urethane Seal kit includes @6 and @7. Order the seal kit, based on each bore size. (Except #3.) Seal kit includes a grease pack (10 g).

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

S2 S3 S6 S7 AC servo motor (Incremental encoder) 100 W PNP 2pcs. AC servo motor (Incremental encoder) 200 W PNP 3pcs.