Stopper Cylinder

[mm] Bore size A B E J K M N O T Z 40 152.5 52.5 52 5 41 40 5.5 9 depth 7 44 15 50 154 54 64 7 50 50 6.6 11 depth 8 56 19 D* Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not specified.

Air Cylinder

K FX A A N N FZ H + Stroke S + Basic type H ZZ + 2 x Stroke d e L f 10.2 h + L ZZ + L + Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E FB FD FT FV FX FY FZ G H1 J K KA M (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 71 81 9 9 12 12 15 18 18 60 70 86 80 90 42 50

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Electric Slide Tables

Cable length 280 80.5 10.5 (L) Stroke A-A 2 sections +0.030 0 4H9 ( ) depth 4 4H9 ( ) depth 4 +0.030 0 14 40 4 x M5 x 0.8 x 10 5 4 x 4.3 A 4 x 8 19 5.8 18.2 A J F 8 2 x M5 x 0.8 x 10 Top mounting not available With lock Connector Step motor Servo motor Lock cable (3.5) Motor cable (2 x 5) Motor cable 24 20 24 20 Lock cable (1.6) 65 20 20 Cable length 280 134 15 15 [mm] L B E F J K Model

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) H1 MM FZ FX Relief port (20, 25) Eh8 D I 20 to 32 Width across flats KA 1.5 A AL K Standard port Relief port (32, 40) Width across flats NA 4 x FD 45 FT F ZZ + Stroke Z + Stroke S + Stroke H FY 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5 28 FL Z H H2 H1 S P I F C2 A ZZ

Air Slide Table

10, 20 ST 10 to 30 ST 40 to 75 0.002 0.050 0.002 ST 10 to 75 0.000 0.000 0.000 0 20 40 60 0 20 40 60 0 20 40 60 Load [N] Load [N] Load [N] (Plate size: t = 12) Lr = 160 mm MXQ20(A)-Z, MXQ16B-Z MXQ20(A)-Z, MXQ16B-Z MXQ20(A)-Z, MXQ16B-Z 0.018 0.025 0.600 ST 125, 150 0.016 ST 150 0.500 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 10 to 40 0.020 ST 75, 100 0.014

Mechanically Jointed Rodless Cylinder Series MY1

Nil None With side seal Note) Cylinders with side seal are available for 16 to 40. Nil K 25, 32, 40, 50, 63 Note) S is available when stroke adjusting units are A and L.

7

L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T

Battery-less

35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE Lead A B C A B C A B C A B C Ambient

C85

fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5

C85

fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5

Tie-rod Type Hydraulic Cylinder

GA M Width across flats G Width across flats G MM MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A K H + Stroke S + Stroke FX H ZZ + 2 strokes FZ (mm) Bore size (mm) A B C a B E D d F FD G GA J K M MA MM NA P FT FX FY FZ H 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 60 44 18 25 9 14 17.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

C76

B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

B A 32 6 7 7 8 40 11 13 12 14 Aim at this number.

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Air Slide Table

A B 5H9 depth 5 +0.030 0 10.5 10.5 9.5 24 NN x M6 x 1 Tapped through hole 6 A B GA HA 5H9 depth 5 +0.030 0 Section AA Section BB (mm) ZZ 89 89 99 109 125 157 200 225 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 K 28 38 48 58 68 93 118 143 J 40 40 50 60 68 105 145 165 I 12 12 12 12 20 15 18 23 NN 2 2 2 2 3 3 4 5 H 39 39 48 58 52 44 44 G 18 18 19 19 21 36 17 N 4 4 4 4 6 6

Basic type / Direct mount type Series CY3B/CY3R

XGT 10-10 0 5 10 CYV Time [min] e e a a l l k k w w a a 1 2 o o g g O-ring seals separate vacuum and atmosphere Employs a magnetically coupled rodless cylinder with no air leakage from moving parts L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

LX

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

EtherNet/IP K @4 PCA-141m 7/8 inch, 4 pins, Socket, Straight 2 m, 6 m @5 PCA-141m 7/8 inch, 4 pins, Socket, Angle PROFINET @1 PCA-15588m 7/8 inch, 5 pins, Socket, Straight 2 m, 6 m EX500 K @2 PCA-15588m 7/8 inch, 5 pins, Socket, Angle PROFIBUS DP K @6 EX500-APm-S M12, 5 pins, A-coded, Socket, Straight 1 m, 5 m DeviceNet @7 EX500-APm-A M12, 5 pins, A-coded, Socket, Angle EtherNet/IP K @6 EX500