Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AK ASS ASR ASF 15-9-25

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Material 14284 NBR Description O-ring ASP y ASN AQ ASV AK ASS ASR ASF 15-9-35

AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity with internal changes only, no change in external dimensions.

AS-FM

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AK Ex.) AS1201FM-M5-23-X12 Ex.)

Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Residual Pressure Release Valve

Pressure in the cylinder MPa D L1 Q Condition: Cylinder I.D. 100 Stroke 200 mm ASP 0.5 B A D 0.4 8 4.2 ASN Applicable tubing W (mm) 0.3 M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 10 15 22.5 29.5 ASV 0.05 MPa 0.1 0.05 AK

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

400 300 300 400 300 9 10 19 40 4 40 55 20 8 21 7 4 60 75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

HRX-OM-T002

. 9-2 9.1.3 HRS090-A-46. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant with GWP reference . 9-7 9.1.8 Communication specification . 9-7 9.2 Outline dimensions . 9-8 9.2.1 HRS090-A-20/40/46-. 9-8 9.2.2 HRS090-W-20/40/46-. 9-9 9.3 Flow diagram . 9-10 9.3.1 HRS090-A-20/40/46-. 9-10 9.3.2 HRS090-W-20/40/46 . 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRS090

HRX-OM-R026

. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090-A-20/40. 9-7 9.2.2 HRSH090-W-20/40. 9-8 9.3 Flow diagram . 9-9 9.3.1 HRSH090-A-20/40. 9-9 9.3.2 HRSH090-W-20/40. 9-9 9.4 Cooling capacity . 9-10 HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: K (w/Fluid Fill Port, Manual)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: K (w/Fluid Fill Port, Manual)

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: K (w/Fluid Fill Port, Manual)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: A (w/Caster Adjuster-foot)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: A (w/Caster Adjuster-foot)