10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

2/3 Port Valve

K N.C. N.O. 72 80 95 100 88 97 108.5 113.5 41 41 44 44 VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 DIN connector: D FN.C.E Normally closed EN.O.F Normally open VX VNl VQ Model N N.C. N.O. K P N.O.

High-Precision Digital Pressure Switch

-A1 ZS-46-5L M5 Lead wire with connector (5-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port J Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 *1 All texts are in both English and Japanese.

High Purity Chemical Valve

E F G H1 H2 J K L M N Model LVH20m LVH30m LVH40m 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 483 Series LVH Dimensions/Threaded Type N Body material: PPS Body material: Stainless steel N G A G A D L Non-locking type Locking type 60 K 4 x M Non-locking type Locking type (H1) (H2) C 60 A B

MY1

M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100

Air Cylinder Series CS1

Material: Rolled steel +0.084 0 +0.3 +0.1 0.1 0.3 125 140 160 180 200 250 300 Y-12 32 8 46 27 42 25 64 100 M30 x 1.5 H B C D d Part no. 0.1 0.3 +0.084 0 +0.3 +0.1 Y-14 36 8 48 30 47 28 72 105 M30 x 1.5 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 125, 140 160 180 200 250 300 18 46 53.1 44 M30 x 1.5 0.1 0.3 +0.1 0 +0.3 +0.1 Y-16 8 55 34 46 40 110 32 80 M36 x 1.5 21 55 63.5 53 M36 x 1.5 0.1 0.3 +0.1

CLS

F N N M TT S + Stroke H BY TX TZ ZZ + Stroke BW With rod boot 180, 200, 250 Z1+ l + 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31 36 41 46 56 19

Electric Actuator

Note 2) The direction of rod end width across flats (;K) differs depending on the products.

CM2

Symbol Maximum ambient Rod boot material temperature One side Both sides J JJ 70C Nylon tarpaulin Symbol Specifications K KK 110C Heat resistant tarpaulin -XA Change of rod end shape Mounting Bracket Part No. Maximum ambient temperature for the rod boot itself.

High Purity Fluoropolymer

Description Body class Symbol Bracket assembly LQ-GBL J K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L M L type M type (for short piping) Table 1 Tubing size symbols Part No.

MNB

GE B B2 H A S + Stroke H + Stroke A K AL C 4-FD K F GF BN Width across flats B1 4-J Cushion valve GB Effective thread length MM H1 V Q Fd E D D FY B MM Width across flats F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective thread length (mm) Width across flats A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4

MNB

B2 H + Stroke A K AL A S + Stroke H Width across flats B1 ?? ??

MNB

GE B B2 H A S + Stroke H + Stroke A K AL C 4-FD K F GF BN Width across flats B1 4-J Cushion valve GB Effective thread length MM H1 V Q Fd E D D FY B MM Width across flats F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective thread length (mm) Width across flats A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PL_ _ ]) . 5-46 6.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NX NZ Material: Rolled steel C85 Applicable bore size (mm) 125 140 160 180 200 250 300 Y-12 +0.084 0 +0.3 +0.1 0.1 0.3 32 25 64 Part no. 8 46 100 M30 x 1.5 27 42 D C B d H Y-14 125, 140 160 180 200 250 300 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 0.1 0.3 +0.084 0 +0.3 +0.1 36 28 72 8 48 105 M30 x 1.5 30 47 53.1 44 46 18 M30 x 1.5 C95 Y-16 +0.1 0 +0.3 +0.1 0.1 0.3 40 32 80 8 55 110 M36 x 1.5 34

One-touch Fittings

KQ2LE KQ2TW P.47 P.43 P.46 Use to four-branch a line. Sealant/Gasket Seal Face Seal Gasket Seal Male run tee Tube cap KQ2Y Use to branch a female thread in the same direction and at a 90 angle. KQ2C P.46 P.44 Use to plug unused tubing. The following models do not support oval type release buttons. Refer to the round type (from page 133).

Cooling Capacity: 150, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: AK (A + K)

Cooling Capacity: 150, Thread Type: Rc, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A (w/Caster Adjuster-foot)

Cooling Capacity: 150, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A + K, UL Certification: -, Option 2: -