High Vacuum Angle Valve, XL Series Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Standard Stroke Model Standard stroke (mm) 10, 20, 30, 40, 50 MXQ6 10, 20, 30, 40, 50, 75 MXQ8 10, 20, 30, 40, 50, 75, 100 MXQ12 10, 20, 30, 40, 50, 75, 100, 125 MXQ16 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ20 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ25 8-5-9 10 Series MXQ Theoretical Output IN OUT The dual rod ensures an output twice that of existing cylinders.
(REH/Linear guide type) Series REAL Size: 10, 15, 20, 25, 32, 40 To ensure a permanent path When smoother operation is required, even with an offset load Stable operation is possible, even with an offset load, by using ball bushings. Series REAH Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment.
Combination of [B] and [K] is not possible.
Combination of [B] and [K] is not possible.
M = W x 9.8 (Ln + An)/1000 Correction value of moment center position distance An: Table (3) Ma = K Mmax Workpiece mounting coefficient K: Fig. (3) Allowable moment coefficient : Graph (2) Maximum allowable moment Mmax: Table (4) 2 = M/Ma Find the allowable static moment Ma (Nm).
needle NW Z + Stroke 2-P (Hexagon socket head taper plug) MW (mm) Bore size (mm) B 6 C 3.5 CH 25 G 8.5 GB 16.2 H 52 HG 13.5 J M5 x 0.8 K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6 MM M4 x 0.7 MW N 20 NC 13.5 NE 49.5 NG A 90 16 20 25 32 40 13.5 110 7.5 4.5 26 10.5 20 58 17 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 17 120 9 5.5 25.7 16 24.5 66 22 M6 x 1 9.5 142 5.6 38.7 49 100 10 M5
Attainment point: 20[mm] In pos[mm] k Position[mm] c 0 5 10 15 20 25 Stroke [mm] Condition 2) In case the pushing operation is Step no.1 to Step no.2.
The cushion effect (smooth start-up, soft stop) cannot be obtained in an intermediate stop or return from an intermediate stop using an external stopper, etc.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Electric Actuator with Integrated Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8
40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H H1 J K Up to 500 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 50 16 12 12 10 51 8 M8 x 1.25 6 Up to 600 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56 20 13 15 12 58 11 M8 x 1.25 7 Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 65 20 18 12 15 58 11 M10 x 1.25 7 Up to 750 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 79.5 20
/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)
10 (12) 6.5 M5 x 0.8 to 300 20 to 300 96 22 19.5 17 45 103 1/8 57 16.5 10 25 9 7 10 6 31 301 to 400 301 to 400 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 97 22 19.5 17 45 104 1/8 57 20 12 25 9 7 10 6 38 301 to 450 301 to 450 10 (13) 7 M6 x 1 to 300 20 to 300 104 30 27 19 52 112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M MM NA PG PH PL S LC LD
Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise
G 4 x J 4 x FD G Width across flats B1 RY FB FY D E e C B H1 N RT N FT AL C B f L 10.2 A K h + L S + Stroke H M FX FZ ZZ + L + Stroke ZZ + Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E FB FD FT FY FZ G H1 J K KA M FX (mm) 40 50 63 80 501 to 800 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 71 88 9 9 12 20 23 28 29 42 58 64 84
12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room
0 A B NN-M4 X 0.7 thread 8 deep MGG 4 MGC 1 MGF 7 7 6.5 3.2 CY1 A B 11 5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L
CY1S15, 20 to 40 (mm) J x K GP G FB A L B C D d EA EB FA H HA HG HP HT HS HB Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M6 x 1.0 x 9.5 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M8 x 1.25 x 10 12.5 14 8 33.6 20 8
AXT100-DR-9 AXT100-DR-11 AXT100-DR-13 AXT100-DR-16 AXT100-DR-18 AXT100-DR-20 AXT100-DR-22 AXT100-DR-25 AXT100-DR-27 AXT100-DR-29 123 148 173 210.5 235.5 260.5 285.5 33.5 18 323 14 IN OUT IN OUT IN 348 373 ARM11AB1-12-A Handle position: Front/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 81 5.3 52.5 5.5 SMC SMC 0.1 0.3 0.6 0.2 0.4 0.5 SMC 56 28 SMC SMC K K
AXT100-DR-9 AXT100-DR-11 AXT100-DR-13 AXT100-DR-16 AXT100-DR-18 AXT100-DR-20 AXT100-DR-22 AXT100-DR-25 AXT100-DR-27 AXT100-DR-29 123 148 173 210.5 235.5 260.5 285.5 33.5 18 323 14 IN OUT IN OUT IN 348 373 ARM11AB1-12-A Handle position: Front/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 81 5.3 52.5 5.5 SMC SMC 0.1 0.3 0.6 0.2 0.4 0.5 SMC 56 28 SMC SMC K K