AWM20 to AWM40

M N Q R S T U V W Y Z B B B B B AWM20/AWD20 30 34 44 5.4 15.4 55 2.3 30 28.5 14 6 177 164 160 AWM30/AWD30 41 40 46 6.5 8 53 2.3 31 38.5 19 7 242 209 208 214 234 AWM40/AWD40 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 278 247 246 252 272 Note) The total length of B dimension is the length when the filter regulator handle is unlocked. 72 Options Digital Pressure Switch ISE35 N 25 M L A Applicable

AWM20 to AWM40

M N Q R S T U V W Y Z B B B B B AWM20/AWD20 30 34 44 5.4 15.4 55 2.3 30 28.5 14 6 177 164 160 AWM30/AWD30 41 40 46 6.5 8 53 2.3 31 38.5 19 7 242 209 208 214 234 AWM40/AWD40 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 278 247 246 252 272 Note) The total length of B dimension is the length when the filter regulator handle is unlocked. 72 Options Digital Pressure Switch ISE35 N 25 M L A Applicable

Vacuum Regulator

NPN open collector 1 output, Lead wire with connector (Length 2 m) PNP open collector 1 output , Lead wire with connector (Length 2 m) NPN open collector 2 outputs, Lead wire with connector (Length 2 m) PNP open collector 2 outputs, Lead wire with connector (Length 2 m) Digital pressure switch specifications ZSE30A-01-N-ML ZSE30A-01-P-ML ZSE30A-01-A-ML ZSE30A-01-B-ML 1 to 3 are assembled

IZx-OMX0087

Symbol Layout direction Length (m) Symbol Length (m) N None N None 3 3 5 5 J 3 E 0.5 10 10 K 5 Straight G 1 15 15 M 10 H 2 Straight N None S 3 J 3 T 5 Angle K 5 To use AC adapter, with transistor Input/Output specify "N", and select AC adapter with the option number.

HRX-OM-W032

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

NVZseies

Tgpe 40 Manifold,/ Side Ported inch (mm) Grommet (G), (H) Lead wire length L typ plug connector (L) M type plug connctor (M) Type 40R Manifold,/ Side Ported(External Pilot) inch (mm) Grommet (G), (H) L type plug connector (L) M type plug connector (M) inch (mm) crommet (G), (H) 4O Manifold,/ Bottom Ported (ln case oa to-32No.n.

3 Way,3 Port Solenoid Valve NVZ Series

(L) M typ plug connector (M)

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

HRX-OM-W058

10 0.1 Outlet50Hz Return port 0.0 0 10 20 30 Circulating fluid flow [L/min] Fig 9.6-1 Pump capacity(HRS018/030--20-R) 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R 0.8 80 0.7 70 available area Circulating fluid pressure [MPa] 0.6 60 Pump head[m] 0.5 50 Outlet: 60Hz 0.4 40 0.3 30 Outlet: 50Hz 0.2 20 available area 0.1 10 Return port 0.0 0 0 5 10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-2

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Main line flow control M/C M/C M/C Flow control for each branch line Remote control is possible with accumulated pulse. Digital display allows visualization of flow rate. 2-color display Improved visibility Refer to the Best Pneumatics No. 3, page 1467 for details of multi-counter CEU5.

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: J (w/Automatic Fluid Fill Function)

Cooling Method: Air-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Automatic Fluid Fill Function

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

In-line Air Filter

ZFC1l-l-X03 ZFC-EL019 ZFC3l-l-X03 ZFC-EL020 ZFC5l-l-X03 ZFC-EL015 ZFC7l-l-X03 ZFC-EL016 OUT side IN side Symbol -X04 Filtration: 10 m 4 X04 Standard product Filtration: 10 m Replacement Element Part No. (Element: 1 pc.) Series Part no.

HRX-OM-X027

Note 1 Valve Rc1/2 2 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter.

Micro Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

3

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

STOPPER CYLINDER

RS(D)Q32/40/50LZ How to Order Lever type RS(D)Q32/40/50BZ RS(D)Q32/40/50CZ RS(D)Q32/40/50DZ RS(D)Q32/40/50EZ Mounting base Table 1. Recommended hole diameter Recommended hole Rod cover boss diameter of the mounting base O.D. Model T D RS(D)Q32 36 38 RS(D)Q40 44 48 RS(D)Q50 56 57 Fig. 3 6 - 7-3.

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

Adjust the mounting surface level when using the side support. m m m L L L L Fig. 6 -9- Fig. 7 When using the product that has a stroke that exceeds the stroke fine adjustment range, use an intermediate fixing spacer. Refer to the table below for the stroke fine adjustment range and the stroke adjustment range when using the intermediate fixing spacer.