High Vacuum Angle Valve D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.
Power saving circuit is only available for the Z type. 5 01 SY 5 1 20 LO Z For DC: 10 CE-compliant 1 01 SY 5 1 20 LOZ For AC: 10 Nil Q CE-compliant Note) CE-compliant: For DC only.
/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)
26 27 26 30 31 54 59 67 72 76 8 11 11 13 16 10 13 18 23 25 10 12 15 17 19 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 Bore (mm) W/o rod boot W/ rod boot J K KA L LZ MM N P PG PH PL PW RR S U W H 51 58 58 71 72 ZZ 14 18 18 22 26 Z 244 273 296 347 381 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 h
.) 4-O T Q 2-P AH AG B S W K U L AA AL AB A I J AI AJ 4-AK hole V AP R Y + Stroke Z + Stroke X AG For 4-AO AN AI Cutout window AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AH AG AB AA AL AK AJ AI A 20 25 32 40 50 75, 100, 125, 150, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth
/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.
20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.
Power supply cable (LEC-CK1-1) is an accessory.
moment (6 to 15) [Graph 11] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 Moment M1, M3 [Nm] Moment M1, M3 [Nm] CY1S15-Z CY1S32-Z CY1S25-Z CY1S10-Z CY1S20-Z CY1S6-Z 1 10 0.5 5 200 300 100 400 100 400 300 200 Piston speed [mm/s] Piston speed [mm/s] M2 M2 [Graph 12] Allowable moment (6 to 15) [Graph 13] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 CY1S15-Z CY1S32-Z Moment M2 [Nm
-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K
B -X51 MXP6 Standard product 2.4 2.4 Z 2-plugs: M-3P -X23 (mm) Z 2-hexagon socket set screws: M3 A 20 20 25 B 10.5 9 12 C 8 9 10 D 4.5 5 6 Model MXP10--X51 MXP12--X51 MXP16--X51 (mm) Z 45 60 Model MXP6-5-X23 MXP6-10-X23 MXP10/12/16 Standard products 2-plugs: M-5P 3 3 Z -X23 Z 2-hexagon socket set screws: M5 x 4 (mm) Z 60 90 76 106 102 128 Model MXP10-10-X23 MXP10-20-X23 MXP12-15-X23 MXP12
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
) Bore size Rc, NPT port WA WB Wq WH GA GB P 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size e f h IJ l Z ZZ Bore size RR S TZ V Z ZZ Applicable pin part no. 80 18 108 (122) 64 26 214 (228) 232 (246) IY-G08 100 22 108 (122) 72 32 222 (236) 244 (258) IY-G10 D80 52 10 80 59 1/4 stroke 223 (237) 241 (255) 100 62 7 80 71 231 (245) 253 (267) -X * Refer to the basic
Dimensions other than those listed above are the same as for the standard type. 581 Series CXS Dimensions: 20, 25, 32 ZZ SS Z 3 Z Manual lever insertion 1.7 KK Hexagon (O) Z (mm) O Model CXS20-R CXS25-R CXS32-R Width across flats13 Width across flats16 Width across flats19 (mm) Symbol ZZ Z SS KK Stroke 20 10 50 40 30 75 100 10 20 30 40 75 50 100 10 20 40 10 20 40 75 75 30 50 100 30 50 100
20 24 36 44 56 V 18 22 20 28 28 Y 38 47 Z Bore size (mm) 16 20 32 40 50 14 14 19 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.
Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32
27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 0.1 0.3 20 31.5 102 13 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 10 22 80 +0.084 0 0.1 0.3 25 35.5 100 116 16 up to 750 20 to 750 40 37 41 92 30 52 14 21 M12 x 1.75 10 26 Without rod boot With rod boot P Bore size (mm) S H L MM N RR U Z l Z ZZ e f h Z ZZ 30 M14 x 1.5 27 1/4 10 84 16 165 51 165 175 43 11.2 59 1/4 stroke 173 183
25 26 27 26 30 31 29.5 38 49 61 64 54 59 67 72 76 10 13 18 23 25 32 40 40 52 52 10 12 15 17 19 10 10 10 14 14 85 95 102 113 124 27 32 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244