Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: K (mm) L3 max X W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size W1= J K T J K T J K T J K T Size L3= L1= 10 10 6.5 to 14 4.5 to 14 0.5 to 2 0.5 to 2 Y-1 L2-1 X-3 L1-1 L4= Y= 15 15 8 to 18 5.5 to 18 0.5 to 2.5 0.5 to 2.5 Y-1.5 L2-1 X-4 L1-1 L2= 20 20 9 to 20 6 to 20 0.5 to 3 0.5 to 3 Y-1.5 L2-1 X-4.5 L1-1 X= 30 30 11.5 to 22 8.5 to 22 0.5 to 4 W2= 0.5 to 4 Y-2 L2-2

AC Servo Motor Driver (Network card type ）

TROUBLESHOOTING Alarm No.: 20 Name: Encoder normal communication error 1 Alarm content An error occurred in the communication between an encoder and driver. Detail No.

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

HRX-OM-R026

For HRSH090-AFG thread adapter set (HRS-EP019) 1set For HRSH090-ANNPT thread adapter set (HRS-EP018) 1set 6 For HRSH090-AF-J G thread adapter set (HRS-EP021) 1set For HRSH090-AN-J NPT thread adapter set (HRS-EP020) 1set 2.2 Name and Function of Parts HRSH Series 2-2 HRX-OM-R026 Chapter 2 Name and Function of Parts 2.2.2 HRSH090-W-20/40-(In case of water cooled type) Fig. 2-3 Names of each

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

=j:!

CL

601 to 1000 601 to 1000 751 to 1000 751 to 1000 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) FV GA GB GC J H1 K KA M M1 P MM N S W H ZZ e f h ZZ l 59 66 66 80 81 133 133 141 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4

NCM

Applicable bore size A J B C D E F G H 0.19 K L NY-044 0.38 No.10-32 0.75 0.94 0.56 0.19 0.38 0.56 0.12 No.10-32 7/16", 9/16" NY-075 0.51 0.25 1/4-28 0.94 1.18 0.69 0.25 0.51 0.71 0.16 1/4-28 3/4", 7/8" NY-106 0.51 0.25 5/16-24 0.94 1.18 0.69 0.25 0.51 0.71 0.19 5/16-24 1-1/16" NY-125 0.75 0.38 7/16-20 1.31 1.69 0.94 0.38 0.75 1.02 0.25 7/16-20 1-1/4", 1-1/2" NY-G050 0.75 0.38 1/2-20 1.32

Rotary Table/Rack & Pinion Style Series MSQ

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 211

CNG

22 19.5 17 45 103 1/8 51.5 16.5 10 14 2 97 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 Data 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA

Step Motor Controller

Power supply cable (LEC-CK1-1) is an accessory.

Aluminum High Vacuum Angle Valve

M10, L = 20 Refer to part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

) Symbol Description Applicable size 10 15 20 30 40 Description Shaft type Applicable size 10 15 20 30 40 Shaft type Symbol XA39 Shaft through-hole Shaft through-hole Shaft through-hole S, Y K, T J S, Y K, T J Y K J J XA31 XA33 XA37 XA45 XA47 XA48 XA51 S, Y J, K, T J, K, T J, K, T J, K, T S, Y J, K, T Shaft-end female thread Shaft-end female thread Stepped round shaft Middle-cut chamfer

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

MXS Series Air Slide Table

With end lock (20) MXS20R With buffer (20) MXS20F 2-M6 X 1 thread 13 deep Operating port 2-Rc(PT)1/8 J 15.5 15 20 58 25 44.5 30.5 0.5 45.5 Dimensions not indicated are the same as basic type.

Air Slide Table Series MXP

10 J 28 27 3 0 +0.030 , depth 1.5 4 6 10 9.5 Section AA 3 0 +0.030 , depth 1.5 Q QL Mounting datum level D B MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 DL 6 x M3 x 0.5, depth 4 2 x M3 x 0.5, depth 3.5 15 15 -X (mm) Individual -X G H J K L M N Q QL S V W Z Model MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20

LX

length of an actuator is Stroke + 155 + Motor dimension.

CNA

(mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 x 1.25 Up to 800 Data 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 67 20 18 12

CNA

13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25 14 30 M14 x 1.5 27

53

time 1 min 30 s 20 s Max.