Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Basic type / Direct mount type Series CY3B/CY3R

6 t !0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Stability of suction position,

Applicable buffer assembly (q) ZP3EA-A10 ZP3EB-(T/Y)1JB (10/30/50) ZP3EA-A16 ZP3EB-(T/Y)2JB (10/30/50) t Flat type with groove t Bellows type with groove Refer to page 471 for the products that contain w to y. Mounting nut (Sales unit: 10 pcs.) Part no.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

Compact Rotary Actuator Series CRQ2

A grease pack (10 g) is included. When only a grease pack is needed, order with the following part number. Replacement parts/Grease pack part no: P523010-21 (10 g) 321 Series CRQ2X Construction With auto switch Size 20/30/40 With auto switch Size 10/15 !0 !3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P (51) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 G P MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.) 10 (Clamp stroke) 0 d0.05 0 d0.05 Z D E E G 6 51 77 67.5 10.5 Diamond type Round type (Guide pin dia.: 17.5 or more) H

42

(Including r, t and y) No. Part no. Description Material Qty VVQ4000 1 VFS r VVQ4000-80A-1 Gasket HNBR 10 Type Port thread type t VVQ4000-80A-2 Gasket HNBR 10 VFR Nil Rc N NPT T NPTF F G y VVQ4000-80A-4 Clip Stainless steel 10 A For 1 station C For 2 stations Note 3) Note) Spare parts consist of sets containing 10 pcs. each.

Hydraulic

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

Possible to transfer a workpiece at low-speed.

Shortened shaft Reversed shaft W W XA11 W W W W W XA12 W W XA13 W W W W XA14 W 10, 15 20, 30, 40 XA15 XA16 XA17 W 10, 15 10, 15, 20, 30, 40 XA18 W W W 10, 15, 20, 30, 40 10, 15 W W W W W XA20 XA21 W Stepped round shaft with double-sided chamfer 10, 15 XA22 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made

Vacuum Pad

-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.

Vacuum Pad

-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.

Vacuum Pad

-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.

Vacuum Pad

-T 30 W-B5 7 19 30 M5 x 0.8 4 6 (14) 8 Y Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model A a ZP2-T4030W-B5 ZP2-T5030W-B5 ZP2-T6030W-B5 ZP2-T8030W-B5 C 0.5 30 31 2 x 2.5 0.8 18 Series ZP2 How to Order ZP2 T K 3507 W N 10 B5 With buffer Vacuum inlet () Vacuum inlet direction Symbol Applicable tube O.D.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

0.4

of rated voltage Coil insulation type Equivalent to Class B 3-position pressure center 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) 4-position dual 3-port valve Note) (A) Inrush 1.0 VA (9 mA), Holding 1.0 VA (9 mA) 4 2 110 VAC 1 5 3 Inrush 1.26 VA (

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

End plate t t Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 SUP port EXH port Label for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) VZ3000-123-1A t t Series Assembly part no. Port size Series Assembly part no.

Compact Cylinder

A30 Symbol: A29 Symbol: A28 Symbol: A27 DA 30 H1 30 30 30 H1 W H1 E DA W X T T C1 F L X L F X X L H1 L 182 Series CQ2 Made to Order 1 Please contact SMC for detailed dimensions, specifications, and lead times.

HRX-OM-W002

. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water