o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

XL

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Direct Solenoid

mt,y-A,C. tol.|lold, wltioul manual oprrtor, and Nith oorator mounllng hol. pl!09d. 1 Mmod oPralora$omuy wlti Orln! P80601 1 Faoltcrir*rl coll-A-c. solanold l lli/1m V 3y60 Ha. 120t60 Nt@ aa)a) qIA{S c01ar0 qIA.11 10 '| Solanold str. n!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

HRX-OM-Y120

ASCII code 5 characters Refer to 5.12.11 Communication example. | 0062h 10 decimal number 0 to 4294967295 16 hexadecimal number 0h to Fh 4 bytes 0063h upper level 0064h lower level 0064h 0063h Control board Program No. 10 decimal number 0 to 65535 16 hexadecimal number 0h to Fh 0065h Control board R Program version 10 decimal number 0 to 4294967295 16 hexadecimal number 0h to Fh 4 bytes 0063h

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

DOC1023126

(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 to 100 EQY251 to 50 EQY321 to 70 Torque when held *2 50 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 150 100 Sets the position loop P constant.

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: T (High-lift Pump)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: B (Earth Leakage Breaker)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: BM (B + M)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: BMT (B + M + T)

Type: Thermo-Chiller, Cooling Method: Water Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: Compatible with deionized water (pure water) piping

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: High pump head specification

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: B + M

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: B + M + T

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y5 MANIFOLD SY5000, UM, SS5Y5 BUILT IN FITTING