Compact

q . r. lksi : Screw LXFH5BC 30 Ball t : : t l : . : : : : : t : i : : t : i ' . serie!: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

•

Port With rod boot G G Width across flats KA f "n ~\ :r 2, P (Re. NPT. G) Head flange: CS2G 1 . : . "'t I( r: i-: 1 \ W 'll f:: l '-'; I Q c...::; I ~"~ ...Ab.. ,..;= ~ -LK F N -H S + Stroke .!'!. FT ZZ1 +t+ Stroke Z Z t Stroke (mm) .. ,.,.,." .".

Micro Mechanical Valve Series VM1000

Combination possible: Combination impossible: Construction Side ported Bottom ported R port 3 port only R port 3 port only w t e u Non-actuated Non-actuated w t e u q q i Port 1 Port 2 y r y Port 2 Port 1 r Actuated Actuated Force Force Port 1 Port 2 Port 2 Port 1 Component Parts No. Description Material Note 1 Valve ZDC White coated No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

XL

msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve Initial exhaust valve 600 600 400 400 Smooth exhaust valve T msec T msec 200 200 0

Lightweight and Compact

Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

Tie-rod Type Hydraulic Cylinder

3/4 20 205 140 240 108 (mm) Bore size (mm) ZZ R S T V W 40 246 37 114 11 7.5 8 50 262 43 116 11 10 9 63 280 47 120 11 12 10 80 312 57 132 11 16 13 100 340 66 140 12 20 16 125 340 77 140 12 20 16 160 375 94 159 12 24 20 422 CHAW Series Tie-rod Type Hydraulic Cylinder Double Acting/Double Rod Center trunnion type: CHAWT CHQ CHK CHN Z + 1/2 stroke 2 x Rc P T T GA GA TT Air release Air release

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

an M5 female thread is used.)

MY2

Port variations Applicable cylinder MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 40 Series MY2 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 1. Confirm the specifications.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Stopper Cylinder

0 w q e r t u !

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

VEX1

(RA: Non releif regulator) Construction VEX AN AMC Component Parts Description No. q w e r t y u i o !0 !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

240

6N q w e r t y u i o !

High Vacuum Angle Valve, XL Series

msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve Initial exhaust valve 600 600 400 400 Smooth exhaust valve T msec T msec 200 200 0