Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

IZx-OMP0064

increments from 1 m to 20 m.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

%silltr

P N E U M A T I C T E C H N O I O G Y In Table 4.20, column "65 mm Dia', we find the lollowing equivalent pipe length: 2 . 8 m two elbows: 2. 1.4 m = 1.6 m two 90o bends: 2'0.8 m six standard lees: 6 . 0.7 m = 4 . 2 m two gate valves: 2 . 0.5 m = 1.0 m 9.6 m Total The twelve fittings have a flow resistance equalto approximately 10 m additional pipe lengthThe "E rective Length" ot the pipe

HRX-OM-T002

: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity

SMC Basic Pneumatics

P N E U M A T I C T E C H N O I O G Y In Table 4.20, column "65 mm Dia', we find the lollowing equivalent pipe length: 2 . 8 m two elbows: 2. 1.4 m = 1.6 m two 90o bends: 2'0.8 m six standard lees: 6 . 0.7 m = 4 . 2 m two gate valves: 2 . 0.5 m = 1.0 m 9.6 m Total The twelve fittings have a flow resistance equalto approximately 10 m additional pipe lengthThe "E rective Length" ot the pipe

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Title not found

M 9 _ 6, 10, 16,20 Note 3) aOlvlark ng s electroless niDkel pated, provided 6, 10, 16,20 20,25,32 a a a a a a a a a a a a a a a a a a a o a a a a a a a a a a a a o a i a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a Hexaona ock nut {Wdth across flat) Electroless nicke lr ated ^r""".af T I I ^"" l\4e1r c icable tube O.

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

CATALOG VC10

DC 586-3WMP J-1.6MM only) (Multi-Purpose) 19 10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G 120 60 58 3 AF 16 P Lead

TABLE OF CONTENTS

) Manual Overide version (DC 586-3WMP J-1.6MM only) (Multi-Purpose) 19 10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G

IZx-OMX0087

Symbol Layout direction Length (m) Symbol Length (m) N None N None 3 3 5 5 J 3 E 0.5 10 10 K 5 Straight G 1 15 15 M 10 H 2 Straight N None S 3 J 3 T 5 Angle K 5 To use AC adapter, with transistor Input/Output specify "N", and select AC adapter with the option number.

Ionizer Nozzle type IZN10 Series IZS

Intermittent control timer (P.460) 449 IZN10 Series Accessories Bracket L-bracket/IZN10-B1 Pivoting bracket/IZN10-B2 Fixed mounting Pivot mounting Power supply cable DIN rail mounting bracket/IZN10-B3 [Standard length] IZN10-CP (3 m) IZN10-CPZ (10 m) [Non-standard length] IZN10-CP -X13 01 Cable length 1 m 2 m 01 02 Manifold Single unit The L-bracket and the DIN rail mounting bracket

ZL3-OM00601

No.ZL3-OM00601-B 1.How to Order ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 Without valve ZL3 M 06 1 K1 5 LO Z 1 E A M G 1 With valve Pressure switch ZL3 M 06 1 K1 5 LO Z 1 V A M W 1 with energy saving function 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 1) Max. suction flow 2) Standard supply pressure 4) Exhaust specifications 3 300L/min(ANR) M 0.35MPa Nil Exhaust through silencer H 0.50MPa

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

method setting unit 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150

Direct Solenoid

hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

Air Pilot Operated

Klt (when tactory assembted) XX = No. of Stailons DIMENSIONS A B BBD E G H K M N 3.58 (91) 4.61 ( 1 1 4 2.56 (65) 3.58 r) 1.22 (31) 1.50 (38) 0.26 (5.5) 3.29 (83.5) 3.23 (82) 1,42 (36) 2.05 (52) 't.10 (28) 0.59 05) 'Dlmension if DC Sotenold is Used Mlllimeters In Parentheses MANIFOLD DIMENSIONS I-!

Air Pilot Operated Series NVSA

Klt (when tactory assembted) XX = No. of Stailons DIMENSIONS A B BBD E G H K M N 3.58 (91) 4.61 ( 1 1 4 2.56 (65) 3.58 r) 1.22 (31) 1.50 (38) 0.26 (5.5) 3.29 (83.5) 3.23 (82) 1,42 (36) 2.05 (52) 't.10 (28) 0.59 05) 'Dlmension if DC Sotenold is Used Mlllimeters In Parentheses MANIFOLD DIMENSIONS I-!