Compact Cylinder

IY-G02 CD-MU02 CD-MU03 CD-MU04 Applicable retaining ring C-type 8 for shaft C-type 8 for shaft C-type 10 for shaft C-type 10 for shaft CDH10 (mm) CJ 7 10 10 CI 17 22 27 CH 11 13 13 CF 4 7 10 CE 3.5 3.5 3.5 CB 23 27 31 CA 53 67 85 Size 25 32 40 Part no.

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

Battery-less

: LEFS32EA 20 Lead 24: LEFS32EH 10 Lead 24: LEFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40EB Lead 10: LEFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40EA 30 Lead 30: LEFS40EH Lead 20: LEFS40EA Lead 30: LEFS40EH 20 10 10 0 0 0 100 200 300 400 500 600

LJ1H

With IO connector Motor type 10 20 30 PNP, A contact 1pc. AC servo motor S2 PNP, B contact 2pcs. (Incremental encoder) 100 W PNP, A contact 1pc.,B contact 2pcs.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance (mm) Load point distance (mm) w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

Integrated Controller

10 80 70 60 50 40 30 20 10 0 100 200 300 400 500 600 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 20 15 10 5000 mm/s2 5 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 300 350 400 450 Speed: V [mm/s] EQFS40HC/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 90 80 70 60 50 40 30 20 10 0 45 40 35 30 25 20 15 10 5 0 3000 mm/s2 Work load: W [kg] Work load: W [kg] 10 mm

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly 12 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball AXT625-3A-10 Non plug-in type (For 10) (3) Note 1) For side ported Note 2) 1: A, B port size Rc 1/8, 2: A, B port size Rc 1/4 Note 3) Please contact SMC if parts except for 10/01T/01T1 are needed.

LG1H

LG1H/ Aluminum body With single end support and table moved to the end of the stroke W 10 50 Horizontal load 100% Horizontal load 50% 10 20 Amount of deflection (m) Horizontal Load point distance 1000 500 100 200 W 50 20 10 5 Lateral load 100% 1 2 Lateral load 50% Horizontal empty weight deflection Lateral empty weight deflection Load point distance Lateral 0.5 0.1 0.2 100 200 300 500 1000

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Cylinder

I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

XL

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: T (High-lift Pump)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: BMT (B + M + T)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: J (Automatic Water Supply Function)

Type: Thermo-Chiller, Cooling Method: Water Cooling, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker / Compatible with deionized water (pure water) piping / High pump head specification

Type: -, Cooling Method: -, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: Rc, Optional specifications: Compatible with deionized water (pure water) piping