CL

R +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 8 +0.4 +0.2 8 16 20 22 34 41 42 20 25, 32 40 8.5 10.5 14 25 30 30 M8 X .25 M10 X .25 M14 X 1.5 10.3 12.8 12 11.5 14 14 16 20 22 21 34 41 42 25 30 30 10.3 12.8 12 20 8.5 M8 X .25 11.5 14 14 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 +0.5 +0.3 18 25, 32 40 10.5 16 M10 X 1.25 M14

REA/REB

Note 2) 15 has internal magnets in the body. 15 Series REAR Construction/20 to 40 y Parts list Parts list No. Description Material Note No.

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

CV/MVGQ

x 1.5 22.5 26 Polished round 20 100 Y-10C 4 x 30l MVGQ 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 83 38 20 61 + 0.084 0 20 0.1 0.3 30 105 37 40 83 M26 x 1.5 24.5 28 Knuckle pin, cotter pin, and plain washer are shipped together.

CV/MVGQ

x 1.5 22.5 26 Polished round 20 100 Y-10C 4 x 30l MVGQ 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 83 38 20 61 + 0.084 0 20 0.1 0.3 30 105 37 40 83 M26 x 1.5 24.5 28 Knuckle pin, cotter pin, and plain washer are shipped together.

Programless Controller Series LECP1

Power supply cable (LEC-CK1-1) is an accessory.

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

MY1

20 1.

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: W (mm) L2 L4 max Y Size (mm) E3= E1= Y= 10 5-( 8-Y) to (Y-1 ) X L1 L3 max Size 3 to 8 Y-1 10 L2= 9-(14-X) to (X-3) 15 6-( 2-Y) to (Y-1.5) 5 to 14 X-3 3 to 9 Y-1.5 L4= L1= L3= 15 10-(18-X) to (X-4) 20 7-(10-Y) to (Y-1.5) 8 to 18 X-4 3 to 10 Y-1.5 20 10-(20-X) to (X-4.5) 30 8-(13-Y) to (Y-2 ) 10 to 20 X-4.5 5 to 13 Y-2 X= 30 12-(22-X) to (X-5) 40 9-(15-Y) to (Y-4.5) 10

CY1

2 @8 t o u y !8 !9 @2 @7 CY1R10H @0 !5 @4 !4 !1 !0 i @6 q @9 r 2a 3a With switch rail !9 !8 @0 @2 @7 t @3 !6 !2 y u o @5 @8 CY1R15H to 63H @0 !6 @4 !4 !1 @9 @6 !0 i q r 2a For CY1R15 For CY1R15, 20 3a !9 !8 @2 @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 With switch rail Parts list No. Description No.

Air Cylinder Series CA2

MM 16 22 24 10 55 M14 x 1.5 13 25 12 38 55.5 3 x 18l Polished round 12 40 Y-04D +0.3 +0.1 CJ1 E1 NX NZ L CJP 16 27 28 14 60 M18 x 1.5 15 27 12 38 55.5 3 x 18l Polished round 12 50, 63 Y-05D +0.3 +0.1 D1 CJ2 28 37 36 18 71 M22 x 1.5 19 28 18 55 76.5 4 x 25l Polished round 18 80 Y-08D +0.3 +0.1 A1 L1 U1 CM2 30 83 37 40 21 83 M26 x 1.5 21 38 20 61 4 x 30l Polished round 20 100 Y-10D +0.3 +0.1

Modular F.R.L. Units

1 q r e w t i u y o !0 !

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

Slider Type Ball Screw Drive/11-LEFS Series

0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500 500

Guide Cylinder/Compact Type Series MGC

70 95 125 60 32 M8 x 1.25 1/8 104 12 38 67 4 11 8 7 M12 x 1.75 depth 21 45 82.5 115 150 75 38 M8 x 1.25 1/8 115 12 47 T U V W WH W X Y Z Bore size (mm) 20 25 32 40 30 16 112 53 50 23 30 146 182 30 20 132 63 60 25 37 167 199 25 20 132 63 60 28.5 37 167 202 20 25 162 73 70 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke R Z Y Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32

OMU0023

Write the following data to Y10 to Y1F of the controller with controller ID: 1 (Turn ON Y contacts that instigate an operation command for Step Data 1).

Multi-channel Digital Sensor Monitor ( compatible)

Displayed if an internal data error has occurred. System error 1 1 Not applicable 1 1 1 -106No.PS-OMW0012-C 1: The switch output will be OFF when an error is generated. An error is output when the error output is set (in the product with error output function). 2: When the set output is an over current error when the error output is set, the switch output is OFF.

Integrated Controller

600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20

Clamp Cylinder with Lock

The dog fitting cannot be attached to the knuckle joint, M6 without tap (rod end bracket symbol I or Y). 20 97 30 42.5 Part no.

Digital Flow Switch (Integrated display type) ( compatible)

U8 0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".